Samsung Electronics Co., Ltd.

Hwa-Kyung Shin

Jung-Dal Choi

Joon-Hee Lee

Jong-Sun Sel

Hong-soo Kim

Hong-Soo Kim

Min-Chul Kim

Jong-Ho Lim

Moo-Kyung Lee

A semiconductor device and method of manufacturing a semiconductor device include a plurality of first active regions and a second active region being formed on a substrate. The second active region is formed between two of the first active regions. A plurality of gate structures is formed on respective first active regions. A dummy gate structure is formed on the second active region, and a first voltage is applied to the dummy gate structure.

Semiconductor devices

A gate pattern is disclosed that includes a semiconductor substrate, a lower conductive pattern, an upper conductive pattern, and a sidewall conductive pattern. The lower conductive pattern is on the substrate. The insulating pattern is on the lower conductive pattern. The upper conductive pattern is on the insulating pattern opposite to the lower conductive pattern. The sidewall conductive pattern is on at least a portion of sidewalls of the upper conductive pattern and the lower conductive pattern. The sidewall conductive pattern electrically connects the upper conductive pattern and the lower conductive pattern. An upper edge portion of the lower conductive pattern may be recessed relative to a lower edge portion of the lower conductive pattern to define a ledge thereon. The sidewall conductive pattern may be directly on the ledge and sidewall of the recessed upper edge portion of the lower conductive pattern.

Methods of fabricating semiconductor devices with sidewall conductive patterns

A flash memory device can include a memory cell array that includes a plurality of memory blocks, where each of the memory blocks has memory cells arranged at intersections of word lines and bit lines, where ones of the plurality of memory blocks are immediately adjacent to one another and define memory block pairs. The flash memory device can further include a row selection circuit that is configured to drive the word lines responsive to memory operations associated with a memory address, where the row selection circuit can include respective shield lines that are located between the memory blocks included in each pair and each of the memory blocks in the pair has a common source line therebetween.

Flash memory device

A gate pattern is disclosed that includes a semiconductor substrate, a lower conductive pattern, an upper conductive pattern, and a sidewall conductive patter. The lower conductive pattern is on the substrate. The insulating pattern is on the lower conductive pattern. The upper conductive pattern is on the insulating pattern opposite to the lower conductive pattern. The sidewall conductive pattern is on at least a portion of sidewalls of the upper conductive pattern and the lower conductive pattern. The sidewall conductive pattern electrically connects the upper conductive pattern and the lower conductive pattern. An upper edge portion of the lower conductive pattern may be recessed relative to a lower edge portion of the lower conductive pattern to define a ledge thereon. The sidewall conductive pattern may be directly on the ledge and sidewall of the recessed upper edge portion of the lower conductive pattern.

Growing community of inventors

Gyeonggi-do, South Korea

Hwa-Kyung Shin