Samsung Electronics Co., Ltd.

Hwa-Cheol Lee

Kyeong-seon Shin

Ae-yong Chung

Sang-Joon Ryu

Yong-Hwan Cho

Sang-Kyu Yoon

Se-rae Cho

To measure an inner temperature of a chamber included in a test handler, self-refresh currents of semiconductor memory devices under test are measured. The semiconductor memory devices are disposed in the chamber and have a function of linear temperature compensated self-refresh (Li-TCSR). Local temperature values are generated based on the self-refresh currents, where each local temperature value indicates a temperature near the corresponding semiconductor memory device of the semiconductor memory devices under test.

Methods of measuring and controlling inner temperature of a chamber included in a test handler

A method and system for testing a semiconductor device is disclosed. The method provides an integrated test program defined by a plurality of test items, and a test program defined by a sub-set of the test items. Test data is derived by batch sample testing of the semiconductor device, and an error rate for a test item is computed and then compared to a reference data value. On the basis of the comparison between the error rate and the reference data value, the test program may be modified in real-time.

Real-time optimized testing of semiconductor device

Growing community of inventors

Cheonan-si, South Korea

Hwa-Cheol Lee