Applied Materials, Inc.

Huy D Nguyen

Kirk Allen Fisher

Shaofeng Chen

Xinning Luan

Shawn Joseph Bonham

James M Amos

Philip Michael Amos

Aimee S Erhardt

A substrate support assembly and processing chamber having the same are disclosed herein. In one embodiment, a substrate support assembly is provided that includes a body. The body has a center, an outer perimeter connecting a substrate support surface and a backside surface. The body additionally has a pocket disposed on the substrate support surface at the center and a lip disposed between the pocket and the outer perimeter. A layer is formed in the pocket of the substrate support surface. A plurality of discrete islands are disposed in the layer, wherein the discrete islands are disposed about a center line extending perpendicular from the substrate support surface.

Layer with discrete islands formed on a substrate support

Growing community of inventors

San Ramon, CA, United States of America

Huy D Nguyen