United Microelectronics Corp.

Other

Utek Semiconductor Corporation

Hunter Chung

Ju-Long Lee

Weng-Yi Chen

Jing-Yi Huang

Ping-Chung Chung

Tsung-Lin Lu

Chien-Feng Chen

Chi-Hsien Chen

Chin-Hsien Chen

Lu Tsung-Lin

Jack Yao

Chung Ping-Chung

Chienfeng Chen

A method for removing extraneous matters from a stainless device is provided. The method includes the steps of (a) providing a container for holding a fluorine-containing neutral solution therein, (b) immersing said stainless device in said fluorine-containing neutral solution to remove said extraneous matters from said stainless device, and (c) heating and swirling said fluorine-containing solution. The fluorine-containing neutral solution is made from neutralizing hydrofluoric acid (HF) with ammonium hydroxide (NH,OH), neutralizing hydrofluoric acid (HF) with ammonium fluoride (NH,F), or dissolving ammonium acid fluoride (NH,F) in a deionized water (DIW).

Method for removing extraneous matter by using fluorine-containing solution

An exhaust gas treatment apparatus for treating exhaust gas generated in semiconductor manufacturing processes. It includes a main pipe, a gas vortex means, a water vortex means, an U pipe and a discharge pipe. The main pipe transforms the exhaust gases to waste powder which are discharged out through the U pipe and the discharge pipe. The gas vortex means and water vortex means are located below the main pipe for generating annular and even downward gas flow and water flow at the outlet of the main pipe for preventing reflux of waste powder from entering into the main pipe. Waste powder thus won't deposit around the outlet. Scraper in the main pipe won't be stuck or deformed. Waste powder may be discharged out through the U pipe and discharge pipe smoothly and efficiently.

Exhaust gas treatment apparatus including a water vortex means and a discharge pipe

An exhaust treatment machine. The exhaust treatment machine has a burning chamber and a wet chamber. Water is injected into the wet chamber by a water inlet at a bottom portion of the wet chamber. At least two rotor blades are installed over the bottom of the wet chamber to generate a vortex flow of the water. Thus, the vortex flow of the water acentrically flushes away the product produced in the burning chamber and removes it via a drainpipe. Furthermore, those clots agglomerated from the powers produced in the burning chamber are fragmented by the rotor blades. The problems of blocking the drainpipe is thus resolved.

Exhaust treatment machine

Growing community of inventors

Hsinchu, Taiwan

Hunter Chung