Power Quotient International Company, Inc.

Snaptrack Incorporated

Hung-Yi Lin

Bor-Shiun Lee

Chia-Hsin Tsai

Sheng-Yi Hsiao

Yu-Cheng Chang

Ya-Fen Chen

Chih-Chun Lee

This disclosure provides systems, methods, and apparatus for reducing tilt instability in an electromechanical systems (EMS) device, where the EMS device includes a plurality of hinges supporting a movable mirror over a stationary electrode and having identical hinge lengths. The EMS device can include a plurality of first anchor points providing connection at the substrate and a plurality of second anchor points providing connection at the movable mirror. Each of the hinges can be positioned between paired first and second anchor points and symmetrically arranged about the center of the movable mirror. In some implementations, the plurality of first anchor points and the plurality of second anchor points can be defined by a single mask.

Electromechanical systems device with hinges for reducing tilt instability

Flash drive

Growing community of inventors

Taipei, Taiwan

Hung-Yi Lin