Applied Materials, Inc.

Hung Xuan Hoang

Jagan Rangarajan

Dmitry Sklyar

Ricardo Martinez

Brett Christian Hoogensen

Farooq Aleem

William Wadsworth

In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.

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Milpitas, CA, United States of America

Hung Xuan Hoang