Industrial Technology Research Institute

Taiwan Semiconductor Manufacturing Comp. Ltd.

Hung-Wei Lin

Hau-Wei Wang

Shu-Ping Dong

Ryan Chia-Jen Chen

Chun-Hung Lee

Lung-Kai Mao

Ching-Yao Wang

Shih-Chiang Chen

Li-Ting Huang

Lyu-Han Chen

Yu-Lun Chen

Generally, this disclosure provides examples relating to tuning etch rates of dielectric material. In an embodiment, a dielectric material is conformally deposited in first and second trenches in a substrate. Merged lateral growth fronts of the first dielectric material in the first trench form a seam in the first trench. The dielectric material is treated. The treating causes a species to be on first and second upper surfaces of the dielectric material in the first and second trenches, respectively, to be in the seam, and to diffuse into the respective dielectric material in the first and second trenches. After the treating, the respective dielectric material is etched. A ratio of an etch rate of the dielectric material in the second trench to an etch rate of the dielectric material in the first trench is altered by presence of the species in the dielectric material during the etching.

Surface treatment for etch tuning

A system and method for synchronizing publication and subscription of message queues are provided. The method includes: providing a message broker cluster including a plurality of message brokers each having a buffer queue and a data queue; as any one of the message brokers requests a synchronization requirement, selecting, by an orchestration server, one of the message brokers in the message broker cluster to perform data synchronization; setting a data read-lock to the data queue of the selected message broker sequentially to write data contents in the buffer queues of all of the plurality of message brokers into the data queue of the selected message broker; and copying the complete data contents in the data queue of the selected message broker to the data queues of the other message brokers, allowing the data contents in the data queues of each of the message brokers to be consistent.

Method and system for synchronizing publication and subscription of message queues

A method and a communication device for network address translation (NAT) traversal is provided. The method includes following steps. A NAT device information is exchanged between a communication device and another communication device. A relay connection is established between the communication device and the another communication device through a relay server. Whether it is feasible to establish a P2P connection between the communication device and the another communication device is determined according to the NAT device information. When it is feasible to establish the P2P connection between the communication device and the another communication device, an attempt to establish the P2P connection between the communication device and the another communication device is made. If the P2P connection is not established successfully, an attempt to establish the P2P connection between the communication device and the another communication device is made again.

Method and communication device for network address translation traversal

A method of workflow monitoring and analysis includes: according to an image to generate at least one three-dimensional joint coordinate, and according to the three dimensional joint coordinate to generate at least one task posture information; according to a movement information to generate at least one three-dimensional track information, and according to the three dimensional track to generate at least one task track information; and according to a workpiece posture information, the task posture information, a workpiece movement information and the task track information to generate a task semanticist.

Workflow monitoring and analysis system and method thereof

A three-dimensional (3D) interactive device and an operation method thereof are provided. The 3D interactive device includes a projection unit, an image capturing unit, and an image processing unit. The projection unit projects an interactive pattern to a surface of a body, so that a user performs an interactive trigger operation on the interactive pattern by a gesture. The image capturing unit captures a depth image within an image capturing range. The image processing unit receives the depth image and determines whether the depth image includes a hand region of the user. If yes, the image processing unit performs hand geometric recognition on the hand region to obtain gesture interactive semantics. According to the gesture interactive semantics, the image processing unit controls the projection unit and the image capturing unit. Accordingly, the disclosure provides a portable, contact-free 3D interactive device.

Growing community of inventors

Hsinchu, Taiwan

Hung-Wei Lin