Luxembourg Institute of Science and Technology

National University of Singapore

Hung Quang Hoang

Tom Wirtz

Anjam Khursheed

David Dowsett

Olivier Bouton

Rathaiah Pureti

A detection apparatus and method for detecting charged particles. The device relies on a detection assembly comprising microchannel plates. The useful surface of the microchannel plate device is maximized in time through the use of beam deflection means upstream of the detection front.

Apparatus and method for high-performance charged particle detection

A detection device for detecting charges particles. The active area of the detector extends along a principal direction over several centimeters and up to 1 meter or more. This allows for its use as a focal plane detector for a mass spectrometer device, allowing to record all mass-to-charge ratios provided by the spectrometer in parallel and within a reduced acquisition time.

Focal plane detector

The present invention relates to a compact and portable mass spectrometer device comprising a source of ions, a non-scanning magnetic sector for separating ions originating at the source of ions according to their mass-to-charge ratios, and a detection means. The magnetic sector comprises an ion entrance plane and at least two ion exit planes, which allow to optimize the resolving power of the mass spectrometer for specific mass-to charge ratio sub-ranges.

Mass spectrometer with improved magnetic sector

The present invention relates to a mass spectrometer device comprising a source of ions, an electrostatic sector, a non-scanning magnetic sector arranged downstream of the electrostatic sector, for separating ions originating at the source of ions according to their mass-to-charge ratios, and a detection means. A magnetic shunt is arranged in the drift space between the electrostatic sector and the magnetic sector. The proposed position of the magnetic shunt enhances the resolving power of the mass spectrometer device.

Mass spectrometer with optimized magnetic shunt

A parallel radial mirror analyzer (PRMA) () for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen is disclosed. The PRMA comprises a zero-volt equipotential grid (), and a plurality of electrodes () electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to exit through the grid () to form corresponding second-order focal points on a detector (). The detector () is disposed external to the corresponding electrostatic fields. A related method is also disclosed.

Parallel radial mirror analyser with an angled zero-volt equipotential exit grid for scanning electron microscopes

A sequential radial mirror analyzer (RMA) () for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen () is disclosed. The RMA comprises a 0V equipotential exit grid (), and a plurality of electrodes () electrically configured to generate corresponding electrostatic fields for deflecting at least some of the charged particles of a single energy level to exit through the exit grid () to form a second-order focal point on a detector (). The second-order focal point is associated with the single energy level, and the detector () is disposed external to the corresponding electrostatic fields. A related method is also disclosed.

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Esch-sur-Alzette, Luxembourg

Hung Quang Hoang