Microjet Technology Company, Ltd.

Hung-Hsin Liao

Shih-Chang Chen

Chi-Feng Huang

Jia-Yu Liao

Yung-Lung Han

Wei-Ming Lee

Shou-Hung Chen

Che-Wei Huang

Jheng-Wei Chen

Chia-Hao Chang

Hao-Jan Mou

Ying-Lun Chang

Chao-Chih Chen

Chang-Yen Tsai

Chung-Wei Kao

Chun-Yi Kuo

Li-Pang Mo

Yang Ku

Chih-Feng Lin

Chien-Tang Wen

Chiu-Lin Lee

Mei-Yen Chen

An actuating and sensing module is disclosed and includes a bottom plate, a gas pressure sensor, a thin gas transportation device and a cover plate. The bottom plate includes a pressure relief orifice, a discharging orifice and a communication orifice. The gas pressure sensor is disposed on the bottom plate and seals the communication orifice. The thin gas transportation device is disposed on the bottom plate and seals the pressure relief orifice and the discharging orifice. The cover plate is disposed on the bottom plate and covers the gas pressure sensor and the thin gas-transportation device. The cover plate includes an intake orifice. The thin gas transportation device is driven to inhale gas through the intake orifice, the gas is then discharged through the discharging orifice by the thin gas transportation device, and a pressure change of the gas is sensed by the gas pressure sensor.

Actuating and sensing module

A piezoelectric actuator includes a square suspension plate, an outer frame, a plurality of brackets and a square piezoelectric ceramic plate. The outer frame is arranged around the suspension plate. A second surface of the outer frame and a second surface of the suspension plate are coplanar with each other. Each of the plurality of brackets has two ends, a first end is perpendicular to and connected with the suspension plate, and a second end is perpendicular to and connected with the outer frame for elastically supporting the suspension plate. Each bracket has a length in a range between 1.22 mm and 1.45 mm and a width in a range between 0.2 mm and 0.6 mm. A length of the piezoelectric ceramic plate is not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate.

Piezoelectric actuator

A thin gas transportation device includes an inlet plate, a resonance sheet, an actuating element, a first insulation frame attached to the actuating element, a conductive frame, and a second insulation frame attached to the conductive frame. The conductive frame has a conductive outer frame attached to the first insulation frame, an elastic conductive pin, and a conductive piece connected to an outer edge portion of the conductive outer frame. One end of the elastic conductive pin is connected to an inner edge portion of the conductive outer frame, and the other end of the elastic conductive pin extends obliquely toward the actuating element and forms a bent portion. The bent portion presses against the actuating element and is electrically connected to the actuating element, and the bent portion is strip-shaped.

Thin gas transportation device

A micro pump is disclosed and includes a fluid-converging plate, a valve membrane, a fluid-outlet plate and a pump core module. The fluid-converging plate includes an inner recess, a protruding portion and a fluid-converging aperture. The protruding portion is disposed at a center of the inner recess. The valve membrane includes a valve aperture. The protruding portion of the fluid-converging plate abuts against the valve aperture. A fluid-converging chamber is formed between the valve membrane and the fluid-converging plate. The fluid-outlet plate in a ring shape includes a fluid-outlet channel. The valve aperture is in fluid communication with the fluid-outlet channel. When the fluid is inhaled into the pump core module, the fluid flows to the fluid-converging chamber through the fluid-converging aperture and then pushes out the valve membrane to flow into the fluid-outlet channel of the fluid-outlet plate through the valve aperture. Thereby the fluid transportation is achieved.

Micro pump

A micro pump includes a base plate, a valve membrane, an upper covering plate and a pump core module. The valve membrane is disposed in a valve membrane accommodation slot of the base plate, seals a fluid channel of the base plate and includes a valve aperture where a protruding portion of the base plate extended through. The upper covering plate is accommodated in an upper covering plate accommodation slot of the base plate and includes a fluid relief aperture sealed by the valve membrane, a fluid converging groove and a fluid converging channel between the fluid converging groove and a fluid-outlet channel of the base plate. The pump core module is accommodated within a pump accommodation slot of the base plate. By actuating the pump core module, the fluid passes through the fluid channel, the valve aperture, the fluid converging groove, and is discharged out through the fluid-outlet channel.

An actuating and sensing module is disclosed and includes a bottom plate, terminals, a control chip, a partition plate, a gas pressure sensor, a thin gas transportation device and a cover plate. The bottom plate includes terminal grooves, a recess, a gas outlet and a gas relief aperture. The terminals are disposed in the terminal grooves. The control chip is disposed in the recess. The partition plate is stacked on the bottom plate and includes an outlet opening in communication with the gas outlet and a pressure relief orifice corresponding to the gas relief aperture. The thin gas transportation device seals the gas outlet and the pressure relief orifice. The cover plate includes an opening passed through by the thin gas transportation device. The gas is transported to the outlet opening by the thin gas transportation device and sensed by the gas pressure sensor disposed in the outlet opening.

A piezoelectric actuator for a miniature fluid transportation device is provided and includes a piezoelectric actuating plate and a piezoelectric element. The piezoelectric actuating plate includes a suspension plate, an outer frame, and brackets. The suspension plate has a first thickness. The outer frame is arranged around the suspension plate and has a third thickness. Each of the brackets is connected between the suspension plate and the outer frame and has a fourth thickness. The third thickness is larger than the first thickness, and the first thickness is larger than the fourth thickness. The suspension plate, the outer frame and the brackets are constructed to form different stepped structures to minimize the thickness of the brackets, enhance the elasticity of the brackets. Thus, displacement of the suspension plate in the vertical direction is enhanced and the transportation efficiency of the miniature fluid transportation device is intensified.

Piezoelectric actuator and piezoelectric actuating plate thereof

An air circulation control device includes a casing and at least one air pump. The casing includes at least one entrance opening, at least one exit opening and an accommodation space. Each air pump is disposed in and closes the corresponding entrance opening. Each air pump includes a first protective film that is a waterproof and dustproof film structure allowing gas to pass therethrough. When the air pump is enabled, the gas is introduced into the accommodation space through the entrance opening and discharged from the accommodation space through the exit opening, so that the gas is circulated.

Air circulation control device

An actuating and sensing module is disclosed and includes an actuating device, a first substrate, a second substrate, a valve membrane and a sensor stacked sequentially. The first substrate includes an intake channel, an exhaust channel, an inlet and an outlet. The valve membrane is disposed between the first substrate and the second substrate and includes an intake valve and an exhaust valve to insulate the intake channel and the exhaust channel, respectively. The actuating device is disposed to seal a through slot of the second substrate to form a compressing chamber. The inlet, the intake channel, the compressing chamber, the exhaust channel and the outlet are in communication with each other to define a gas flow loop. The sensor is disposed in the gas flow loop. While the actuating device drives gas from the outside, the gas is transported into the gas flow loop and sensed by the sensor.

A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate and is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate stacked on each other. A synchronously-deformed structure is defined by the flexible plate and the communication plate. The deformable substrate is bent in the direction toward the vibration plate. There is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of the vibration plate.

Fluid control device

An actuating and sensing module includes a first substrate, a second substrate, an actuating device and a sensor. A gas flow channel is formed by stacking the first substrate and the second substrate. The gas inlet, the gas flow channel and the gas outlet are in communication with each other to define a gas flow loop. The actuating device is disposed in the gas inlet of the second substrate and electrically connected to a control circuit to obtain a driving power. The sensor is disposed in the gas flow loop and electrically connected to a control circuit of the first substrate to transmit sensed data. While the actuating device drives outside gas from the outside, the gas is transported into the gas flow loop and sensed by the sensor.

A gas transportation device includes a gas outlet cover, plural flow-guiding pedestals and plural gas pumps. The gas outlet cover includes a gas outlet nozzle and a gas outlet cavity. The gas outlet nozzle and the gas outlet cavity are in communication with each other. Each flow-guiding pedestal includes a main plate, a protruding frame and a chamber frame. The main plate includes a recess and a communicating aperture in communication with the recess. The gas pumps are disposed inside the chamber frames of the flow-guiding pedestals, respectively. The gas outlet cover covers the flow-guiding pedestals and is connected to the protruding frames, whereby plural convergence chambers are defined and are in communication with the gas outlet cavity. Consequently, the gas is transported through the recesses, the communicating apertures, the convergence chambers and the gas outlet cavity sequentially, and finally is discharged out from the gas outlet nozzle.

Gas transportation device

A miniature gas control device is disclosed and includes a miniature gas transportation device and a miniature valve device. The miniature gas transportation device includes a protective film, a gas inlet plate, a resonance plate and a piezoelectric actuator stack sequentially. The miniature valve device includes a gas collecting plate, a valve film and a gas outlet plate stacked sequentially. By driving the piezoelectric actuator of the miniature gas transportation device, the gas flows into the miniature gas transportation device from the gas inlet plate, then the gas flows into the miniature valve device through the resonance plate, and the valve opening of the valve film is selectively opened or closed in response to a direction of the gas unidirectionally flowing among the perforations and chambers of the gas collection plate and the gas outlet plate, so as to perform a pressurizing operation and a pressure-releasing operation selectively.

Miniature gas control device

A gas transportation device includes a gas outlet cover, at least one flow-guiding pedestal, a primary gas pump, a secondary gas pump and an adhesive film. The gas outlet cover includes a gas outlet nozzle and a gas outlet cavity. Each flow-guiding pedestal includes a main plate, a protruding frame and a chamber frame. The main plate includes a recess and a communicating aperture. The primary gas pump is disposed in the protruding frame, and the secondary gas pump is disposed in the chamber frame. The adhesive film has a hollow structure, is disposed between the primary gas pump and the flow-guiding pedestal and defines a convergence chamber. Consequently, the gas is introduced into the recess, transported to the primary gas pump through the communicating apertures and the convergence chamber, transported to the gas outlet cavity via the primary gas pump, and finally discharged out from the gas outlet nozzle.

A miniature fluid control device for transporting gas is disclosed, which includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate stacked on each other. The gas inlet plate includes at least one inlet, at least one convergence channel and a circular cavity which forms a convergence chamber. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric plate, wherein the suspension plate has a cylindrical bulge aligned with the circular cavity. The ratio of a second diameter of the cylindrical bulge to a first diameter of the circular cavity is set in a specified range to optimize the gas pressure of the transported gas, thus assuring efficiency of gas transmission of the miniature fluid control device.

Growing community of inventors

Hsinchu, Taiwan

Hung-Hsin Liao