Vanguard International Semiconductor Corporation

Hung-Chih Tan

Chih-Cherng Liao

Hsiao-Ying Yang

Hsing-Chao Liu

Chih-Wei Lin

Li-Che Chen

Chien-Hsien Song

Kai-Chuan Kan

Jing-Da Li

A method for forming a semiconductor structure includes providing a substrate including a first region with a first gate structure and a second region with a second gate structure. First to third dielectric layers are formed on the substrate. The third dielectric layer is patterned to form a first portion in the first region and a second portion in the second region. The second region is covered and at least a portion of the first portion is removed to form a first mask. The second dielectric layer is pattern by using the first mask and the second portion as the second mask to expose a portion of the first dielectric layer. The portion of the first dielectric layer is removed to form a first stacked spacer on the first gate structure and a second stacked spacer on the second gate structure.

Semiconductor structure and method for forming the same

A high-voltage semiconductor device includes a substrate, a first insulating structure, a gate, a drain region, a source region and a doped region. The substrate has a first conductive type, and the first insulating structure is disposed on the substrate. The drain region and the source region are disposed in the substrate. The source region has a first portion and a second portion. The first portion has the second conductive type and the second portion has the first conductive type. The gate is disposed on the substrate, between the source region and the drain region to partially cover a side of the first insulating structure. The doped region is disposed in the substrate and has a first doped region and a second doped region, and the first doped region and the second doped region both include the first conductive type and separately disposed under the first insulating structure.

High-voltage semiconductor device

A semiconductor structure is provided. The semiconductor structure includes a substrate, a gate disposed on the substrate, a source disposed in the substrate and located on one side of the gate, a drain disposed in the substrate and located on another side of the gate, and a gate extending portion disposed on the substrate and located between the gate and the drain. The doping type of the gate is the opposite of that of the gate extending portion.

Semiconductor structures

Growing community of inventors

Kaohsiung, Taiwan

Hung-Chih Tan