Taiwan Semiconductor Manufacturing Comp. Ltd.

Hun Lin

Tien-Chen Hu

Der-Yuan Hong

Hong-Chin Pu

Tso-Hsu Lin

Jeng-Fang Chang

A tensioning assembly for a polishing belt on a linear chemical mechanical polishing apparatus. The tensioning assembly comprises first and second rollers which are operably engaged by respective air cylinders and exert a selected degree of downward tension on the lower run of the horizontal polishing belt. A third roller biased typically by a spring pushes upwardly on the lower run of the belt between the first and second rollers. Accordingly, the first and second rollers, in conjunction with the third roller, tension the belt on the apparatus to maintain optimum material removal rates and uniformity. The degree of tension exerted on the belt can be varied according to stretching of the belt resulting from prolonged use.

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Hualien, Taiwan

Hun Lin