Boe Technology Group Co., Ltd.

Hefei Boe Optoelectronics Technology Co., Ltd.

Huihui Mu

Hongwei Xing

Min Yuan

Hequn Zhang

Longgen Yang

The present disclosure provides a clamp and a carrier used in a coating apparatus. The clamp includes a fixed clamping piece and a movable clamping piece connected to the fixed clamping piece through a torsion spring. A guide groove in which a clamping backing plate is slidably mounted is provided on the movable clamping piece. A transmission mechanism is disposed on the movable clamping piece and is connected to the clamping backing plate. When a force is applied to the transmission mechanism to open the movable clamping piece, the transmission mechanism drives the clamping backing plate to retract into the guide groove, and when the force applied to the transmission mechanism is withdrawn, the movable clamping piece is closed under the action of the torsion spring such that the transmission mechanism drives the clamping backing plate to extend out of the guide groove and beyond the movable clamping piece.

Clamp and carrier used in a coating apparatus

Disclosed is a substrate support structure, a vacuum drying apparatus and a method for vacuum drying a substrate. The substrate support structure comprises: a support pin having a top end for supporting a substrate; and an auxiliary support assembly including: a drive device; a support rod driven by the drive device; and a support disc disposed at a top end of the support rod and made of flexible material adapted to support the substrate, wherein the drive device is configured to drive the support rod to move in a direction parallel to an axial direction of the support pin so as to make the support disc positioned below or above the top end of the support pin as the support rod moves, so that the substrate is selectively supported by the support disc or the support pin. The substrate support structure, the vacuum drying apparatus and the method for vacuum drying a substrate can prevent the substrate from being easily scratched and avoid poor quality and uneven brightness of the substrate.

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Beijing, China

Huihui Mu