Industrial Technology Research Institute

Hui-Ya Shih

Shou-Nan Li

Hong-Ping Lin

Wen-An Xie

I-Ling Nien

Sheng-Jen Yu

Yen-An Chen

Gen-Hou Leu

Shaw-Yi Yan

Jui-Hsiang Cheng

Meng-Hsuan Lee

Chia-Yen Kuo

Chuan-Lin Chang

A device and method of simultaneously removing flammable gases and nitrous oxide are provided. The device includes a thermal oxidation chamber, a high-temperature resistant dust filter, and a catalyst chamber. The thermal oxidation chamber is configured to receive an exhaust gas from a process tool. The exhaust gas includes flammable gases and nitrous oxide. The thermal oxidation chamber has a first exhaust pipe to emit nitrous oxide and dust generated after the exhaust gas is thermally oxidized. The high-temperature resistant dust filter receives dust and nitrous oxide from the first exhaust pipe, wherein the high-temperature resistant dust filter has a filter fiber net and a second exhaust pipe, and the second exhaust pipe is configured to emit nitrous oxide. The catalyst chamber receives nitrous oxide from the second exhaust pipe, wherein the catalyst chamber has a nitrous oxide decomposition catalyst to decompose nitrous oxide into nitrogen and oxygen.

Device and method of simultaneously removing flammable gases and nitrous oxide

An air purifier and a purifying method are provided. The air purifier includes a housing, a sterilization and ozone-generating unit, a physical filter, a first ozone-removing unit, and a cover. The housing has a sidewall and a bottom surface to define a processing space, wherein an upper end of the housing has an air inlet and the sidewall has an air outlet. The sterilization and ozone-generating unit is disposed in the processing space. The physical filter is disposed in the processing space, extends along the sidewall, and surrounds the sterilization and ozone-generating unit. The first ozone-removing unit is disposed between the physical filter and the sidewall. The cover is openably disposed at the air inlet.

Air purifier and air purifying method

A carbonized material, a device for removing ozone, and a method for removing ozone are provided. The carbonized material has at least a carbonyl-containing group, alkylol group, and carbon having sphybrid orbital. In particular, the at least one carbonyl-containing group has a carbon content from 10 atom % to 30 atom %, based on the total carbon atoms of the at least one carbonyl-containing group, the at least one alkylol group, and the at least one carbon having sphybrid orbital.

Carbonized material, device for removing ozone, and method for removing ozone

A system for detection of gas leakage sources. An open-path FTIR detection system is located before the return filter of recirculating air of a factory to detect gas composition of recirculating air and transmits the result to a data server through a communication network. A multi-port extractive FTIR system is located in the factory to collect and detect gas sample of local area air using pipelines located in different areas and transmits the result of gas composition to the data server through the communication network. An IR monitor system obtains the gas composition from the data server through the communication network. A process exhaust management system obtains the gas composition from the IR monitor system through the communication network for the analysis of a gas leakage source.

Method and system for detection of gas leakage sources

Growing community of inventors

Hsinchu County, Taiwan

Hui-Ya Shih