Taiwan Semiconductor Manufacturing Comp. Ltd.

Global Unichip Corporation

Tsinghua University

Hui-Ting Yang

Jiann-Tyng Tzeng

Wei-Cheng Lin

Chih-Liang Chen

Charles Chew-Yuen Young

Chih-Ming Lai

Kam-Tou Sio

Ru-Gun Liu

Shih-Wei Peng

Cheng-Chi Chuang

Shun Li Chen

Wei-An Lai

Chia-Tien Wu

Lei-Chun Chou

Lipen Yuan

Chun-Kuang Chen

Tien-Lu Lin

Ko-Bin Kao

Meng-Hung Shen

Chew-Yuen Young

Jack Liu

Ting-Hao Wang

Igor Elkanovich

Yung-Sheng Fang

Amnon Parnass

Chun-Hung Liou

Ting-Chin Cho

Wayne Lai

Yen-Ming Chen

Ming-Fu Tsai

Tsung-Yao Wen

Jui-Yao Lai

Youn-Long Lin

Chang-Ming Liu

Chiung-Chi Lin

A semiconductor device or structure includes a first pattern metal layer disposed between a first supply metal tract and a second supply metal tract, the first pattern metal layer comprising an internal route and a power route. A follow pin couples the first supply metal to the power route. The first supply metal tract comprises a first metal and a follow pin comprises a second metal.

Metal patterning for internal cell routing

A method (of manufacturing conductors for a semiconductor device) includes: forming active regions (ARs) in a first layer, the ARs extending in a first direction; forming a conductive layer over the first layer; forming first, second and third caps over the conductive layer, the caps extending in a second direction perpendicular to the first direction, and the caps having corresponding first, second and third sensitivities that are different from each other; removing portions of the conductive layer not under the first, second or third caps resulting in gate electrodes under the first caps and first and second drain/source (D/S) electrodes correspondingly under the second or third caps; and selectively removing portions of corresponding ones of the first D/S electrodes and the second D/S electrodes.

Method of manufacturing conductors for semiconductor device

A method (of forming a semiconductor device) including forming cell regions (in alternating first and second rows having first and second heights) including forming a majority of the cell regions in the first rows including: limiting a height of the majority of the cell regions to be single-row cell regions that span corresponding single one of the first rows but do not extend therebeyond; and forming a minority of the cell regions correspondingly in at least the first rows including reducing widths of the multi-row cell regions to be smaller than comparable single-row cell regions; and expanding heights of the minority of the cell regions to be multi-row cell regions, each of the multi-row cell regions spanning a corresponding single first row and at least a corresponding second row such that cell region densities of the second rows are at least about forty percent.

Semiconductor device having more similar cell densities in alternating rows

A semiconductor device includes a first transistor having a first fin, wherein a base of the first fin is surrounded by a first dielectric material, the first fin having a first fin height measured from the top surface of the first dielectric material to a top surface of the first fin; and a second transistor having a second fin, wherein a base of the second fin is surrounded by a second dielectric material, the second fin having a second fin height measured from a top surface of the second dielectric material to a top surface of the second fin, wherein the first fin height is different from the second fin height.

Multiple fin height integrated circuit

The present disclosure describes an apparatus with a local interconnect structure. The apparatus can include a first transistor, a second transistor, a first interconnect structure, a second interconnect structure, and a third interconnect structure. The local interconnect structure can be coupled to gate terminals of the first and second transistors and routed at a same interconnect level as reference metal lines coupled to ground and a power supply voltage. The first interconnect structure can be coupled to a source/drain terminal of the first transistor and routed above the local interconnect structure. The second interconnect structure can be coupled to a source/drain terminal of the second transistor and routed above the local interconnect structure. The third interconnect structure can be routed above the local interconnect structure and at a same interconnect level as the first and second interconnect structures.

Method for routing local interconnect structure at same level as reference metal line

Method of forming semiconductor device having more similar cell densities in alternating rows

A system that generates a layout diagram has a processor that implements a method, the method including: generating first and second conductor shapes; generating first, second and third cap shapes correspondingly over the first and second conductor shapes; arranging a corresponding one of the second conductor shapes to be interspersed between each pair of neighboring ones of the first conductor shapes; generating first cut patterns over selected portions of corresponding ones of the first cap shapes; and generating second cut patterns over selected portions of corresponding ones of the second cap shapes. In some circumstances, the first cut patterns are designated as selective for a first etch sensitivity corresponding to the first cap shapes; and the second cut patterns are designated as selective for a second etch sensitivity corresponding to the second cap shapes.

Method and system of manufacturing conductors and semiconductor device which includes conductors

The present disclosure relates to a semiconductor device and a manufacturing method, and more particularly to forming via rail and deep via structures to reduce parasitic capacitances in standard cell structures. Via rail structures are formed in a level different from the conductive lines. The via rail structure can reduce the number of conductive lines and provide larger separations between conductive lines that are on the same interconnect level and thus reduce parasitic capacitance between conductive lines.

Method of making standard cells having via rail and deep via structures

Examples of an integrated circuit a having an advanced two-dimensional (2D) metal connection with metal cut and methods of fabricating the same are provided. An example method for fabricating a conductive interconnection layer of an integrated circuit may include: patterning a conductive connector portion on the conductive interconnection layer of the integrated circuit using extreme ultraviolet (EUV) lithography, wherein the conductive connector portion is patterned to extend across multiple semiconductor structures in a different layer of the integrated circuit; and cutting the conductive connector portion into a plurality of conductive connector sections, wherein the conductive connector portion is cut by removing conductive material from the metal connector portion at one or more locations between the semiconductor structures.

Advanced metal connection with metal cut

A method of manufacturing a semiconductor device including: arranging a first and a second gate strip separating in a first distance, wherein each of the first and the second gate strip is a gate terminal of a transistor; depositing a first contact via on the first gate strip; forming a first conductive strip on the first contact via, wherein the first conductive strip and the first gate strip are crisscrossed from top view; arranging a second and a third conductive strip, above the first conductive strip, separating in a second distance, wherein each of the second and the third conductive strip is free from connecting to the first conductive strip, the first and the second conductive strip are crisscrossed from top view. The first distance is twice as the second distance. A length of the first conductive strip is smaller than two and a half times as the first distance.

Method of manufacturing semiconductor device

The present disclosure describes various non-planar semiconductor devices, such as fin field-effect transistors (finFETs) to provide an example, having one or more metal rail conductors and various methods for fabricating these non-planar semiconductor devices. In some situations, the one or more metal rail conductors can be electrically connected to gate, source, and/or drain regions of these various non-planar semiconductor devices. In these situations, the one or more metal rail conductors can be utilized to electrically connect the gate, the source, and/or the drain regions of various non-planar semiconductor devices to other gate, source, and/or drain regions of various non-planar semiconductor devices and/or other semiconductor devices. However, in other situations, the one or more metal rail conductors can be isolated from the gate, the source, and/or the drain regions these various non-planar semiconductor devices. This isolation prevents electrical connection between the one or more metal rail conductors and the gate, the source, and/or the drain regions these various non-planar semiconductor devices.

Metal rail conductors for non-planar semiconductor devices

A circuit is provided for providing a sampling clock to de-serializers in a communication physical layer. The circuit includes a slave delay lock loop (DLL), to receive an input clock and provide the sampling clock to the de-serializers. Further, a master DLL is included for receiving the input clock and outputting a control signal to the slave DLL to adjust a delay amount of the sampling clock of the slave DLL. The master DLL replicates a circuit of the slave DLL with a loop detection and determines the control signal for output.

Circuit for providing clock to de-serializer in communication physical layer

A method of manufacturing a semiconductor device that includes identifying a first area in the layout diagram which is populated with cells, the first area including first and second rows extending substantially parallel to a first direction, the first and second rows having substantially different cell densities; relative to a second direction, substantially perpendicular to the first direction, the first and second rows having corresponding first (H1) and second (H2) heights. The method also includes replacing cells in the first row which have the H1 height with corresponding substitute cells, each substitute cell being correspondingly taller relative to the second direction and correspondingly narrower relative to the first direction, the replacing thereby increasing a density of the second row at least without substantially increasing a density of the first row.

Semiconductor device including cell region having more similar cell densities in different height rows, and method and system for generating layout diagram of same

A method for forming a non-planar semiconductor device includes: forming a fin structure protruding from a front side of a substrate of the non-planar semiconductor device; depositing a dielectric region on the front side of the substrate, the dielectric region including a conductive rail buried within the dielectric region and in parallel with the fin structure; etching the dielectric region to create a first opening in the dielectric region to expose the conductive rail; depositing a plurality of conductive regions on the dielectric region, one of the conductive regions contacting the conductive rail through the first opening; etching the substrate from a backside of the substrate to form a second opening to expose the conductive rail; and filling a first conductive material into the second opening to form a through-substrate via in the substrate.

Semiconductor device integrating backside power grid and related integrated circuit and fabrication method

Growing community of inventors

Hsinchu, Taiwan

Hui-Ting Yang