Huazhong University of Science and Technology

Optics Valley Laboratory

Hui Gao

Wei Xiong

Xuhao Fan

Mingduo Zhang

Xinger Wang

Yuncheng Liu

Huace Hu

Songyan Xue

Ke Xu

Leimin Deng

Binzhang Jiao

The disclosure belongs to a field of a micro-nano processing technology, and more specifically, relates to a method and application of isotropic shrinkage of a three-dimensional micro-nanostructure. In the disclosure, the high polymer film is prepared by mixing the high polymer material and the solvent, and then spin-coating it on a surface of a substrate. Then, the high polymer film is etched to expose a portion of the surface of the substrate, and a raw material of a three-dimensional structure is processed into a target three-dimensional structure with an etched area as an initial processing position. Then, the target three-dimensional structure is subjected to a stiffness strengthening treatment, immersed in a solvent, and pyrolyzed and calcined to obtain an isotropically shrunk three-dimensional micro-nanostructure.

Method and application of isotropic shrinkage of three-dimensional micro-nanostructure

An optically addressable pixelated spatial light modulator, comprising: a laser light source, a structured light field encoding projection module, and a superpixel metasurface device. The structured light field encoding projection module comprises a structured light field encoding module, which encodes a laser beam emitted by a laser light source into a structured light beam according to the modulation amount distribution of a target light field. The superpixel metasurface device comprises a plurality of unit cell structures, with each unit cell structure serving as a light field modulation pixel point. Each unit cell structure comprises a plurality of sub-wavelength micro-nano structures, and the unit cell structure generates a light field modulation amount under the action of the structured light beam for the light field modulation.

Optically addressable pixelated spatial light modulator and spatial light field modulation method

A two-photon-polymerization laser direct writing system based on an acousto-optic deflector is provided, which includes an ultrafast laser device, a beam expander, a scanning field center angular dispersion compensator, a two-dimensional acousto-optic deflector, a scanning field edge angular dispersion compensator, an astigmatism compensator and a focusing objective lens, the ultrafast laser device is configured to emit an ultrafast laser; the scanning field center angular dispersion compensator is configured to conduct precompensation on an angular dispersion at a center of a scanning field; the two-dimensional acousto-optic deflector is configured to deflect the ultrafast laser on the angular dispersion at the center of the scanning field; the scanning field edge angular dispersion compensator is configured to compensate for an angular dispersion at an edge of the scanning field; the astigmatism compensator is configured to compensate for astigmatism; the focusing objective lens is configured to conduct tight-focusing on the ultrafast laser.

Two-photon-polymerization laser direct writing system based on acousto-optic deflector

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Wuhan, China

Hui Gao