Seagate Technology Incorporated

Hui Brickner

Tong Zhao

Sarbeswar Sahoo

Michael C Kautzky

Yuhang Cheng

YongJun Zhao

John Charles Duda

Martin Giles Blaber

Tae-Woo Lee

Sethuraman Jayashankar

Dongsung Hong

Vijay Karthik Sankar

Anusha Natarajarathinam

Michael Allen Seigler

James Gary Wessel

Mark Thomas Kief

Xiaoyue Huang

Scott Michael Franzen

David Chris Seets

Yi-Kuei Ryan Wu

A method involves depositing a near-field transducer on a substrate of a slider. The near-field transducer comprises a plate-like enlarged portion and a peg portion. A first hard stop extending from the near field transducer and an air bearing surface is formed. A heat sink is formed on the enlarged portion and the first hard stop. A dielectric material is deposited over the near-field transducer and the heat sink. A second hard stop is deposited on the dielectric material away from the air bearing surface. The second hard stop comprises a recess corresponding in size and location to the heat sink. The method involves milling at an oblique angle to the substrate between the first hard stop and second hard stop to cut through the heat sink at the angle. The recess of the second hard stop increases a milling rate over the heat sink compared to a second milling rate of the dielectric away from the heat sink.

Recessed hardmask used to form heat-assisted magnetic recording near-field transducer with heat sink

Devices that include a write pole; a near field transducer (NFT) that includes a peg and a disk, wherein the peg is at the ABS of the device; and a diffusion barrier layer positioned between the write pole and the peg of the NFT, the diffusion barrier layer including metals, nitrides, oxides, carbides, silicides, or amorphous material.

Devices including a diffusion barrier layer

Devices having an air bearing surface (ABS), the devices including a write pole; a near field transducer (NFT) that includes a peg and a disc, wherein the peg is at the ABS of the device; a heat sink positioned adjacent the disc of the NFT; a dielectric gap positioned adjacent the peg of the NFT at the ABS of the device; and a conformal diffusion barrier layer positioned between the write pole and the dielectric gap, the disc, and the heat sink, wherein the conformal diffusion barrier layer forms at least one angle that is not greater than 135&#xb0;.

Recessed hardmask used to form HAMR NFT heat sink

Devices that include a near field transducer (NFT), the NFT having a disc and a peg, and the peg having five surfaces thereof; and at least one adhesion layer positioned on at least one of the five surfaces of the peg, the adhesion layer including one or more of the following: yttrium (Y), tin (Sn), iron (Fe), copper (Cu), carbon (C), holmium (Ho), gallium (Ga), silver (Ag), ytterbium (Yb), chromium (Cr), tantalum (Ta), iridium (Ir), zirconium (Zr), yttrium (Y), scandium (Sc), cobalt (Co), silicon (Si), nickel (Ni), molybdenum (Mo), niobium (Nb), palladium (Pd), titanium (Ti), rhenium (Re), osmium (Os), platinum (Pt), aluminum (Al), ruthenium (Ru), rhodium (Rh), vanadium (V), germanium (Ge), tin (Sn), magnesium (Mg), iron (Fe), copper (Cu), tungsten (W), hafnium (Hf), carbon (C), boron (B), holmium (Ho), antimony (Sb), gallium (Ga), manganese (Mn), silver (Ag), indium (In), bismuth (Bi), zinc (Zn), ytterbium (Yb), and combinations thereof.

Devices including a near field transducer and at least one associated adhesion layer

A method of forming a near field transducer (NFT), the method including the steps of depositing a plasmonic material; depositing an encapsulant material on at least a portion of the plasmonic material; and implanting ions into at least a portion of the plasmonic material through the encapsulant material.

Methods of forming near field transducers and near field transducers formed thereby

Devices including a difussion barrier layer

Near field transducers (NFTs) and devices that include a peg having an air bearing region and an opposing back region, the back region including a sacrificial structure, a disc having a first surface in contact with the peg, and a barrier structure, the barrier structure positioned between the opposing back region of the peg and the first surface of the disc.

Near field transducer having sacrificial structure

A first trench sidewall has a continuous first taper angle that terminates at a first plane. At least one layer may be deposited that forms a second trench sidewall with a continuous second taper angle that extends a predetermined depth past the first plane and is less than the first taper angle. A write pole may then be formed on the second trench sidewall with the write pole being closer to the first trench sidewall at the predetermined depth than at the first plane.

Write pole and shield with different taper angles

Growing community of inventors

Savage, MN, United States of America

Hui Brickner