International Business Machines Corporation

Hitachi Global Storage Technologies Netherlands B.v.

Hitachi Global Storage Technologies

Hugo Alberto Emilio Santini

Richard Hsiao

Robert Fontana

Jeffrey Scott Lille

Mason Lamar Williams

Frederick Hayes Dill

Son Van Nguyen

Edward Hin Pong Lee

Gautam Khera

Moris Musa Dovek

Cherngye Hwang

Mohamad Towfik Krounbi

Aron Pentek

Neil Smith

Yimin Hsu

Scott Arthur MacDonald

Virgil S Speriosu

Thomas Edward Dinan, Jr

Eric James Lee

Samuel Wei-san Yuan

Thomas Carl Clarke

Sanford J Lewis

Frederick Hayes Dill, Jr

Galina Moutchaidze

Vladimir Nikitin

Daniele Mauri

Wen-Chien David Hsiao

Neil Leslie Robertson

Jordan Asher Katine

Ernesto Esteban Marinero

Bruce David Terris

Jui-lung Li

Amanda Baer

Michael Joseph Rooks

Marie-Claire Cyrille

Joseph Francis Smyth

Jennifer Lu

Mason L Williams, Iii

Wenchein Hsiao

Tom King Harris, Iii

Benjamin Lu Chen Wang

Wipul Pemsiri Jayaekara

David Kaimon Lee

Jennifer Liu

Brian Troy

A magnetic head structure for perpendicular recording and reading. The head structure includes a write head portion for writing data to magnetic media via lines of flux oriented substantially perpendicular to a surface of the media facing the write head portion. The write head portion includes a first pole piece having a first pole tip, a probe pole piece with a probe pole tip for emitting magnetic flux, an insulation stack positioned between the pole pieces, and one or more write coils embedded in the insulation stack. A read head portion that has been fabricated after the write head portion is coupled to the write head portion.

Write first design for a perpendicular thin film head

A method of making a magnetic head according to one embodiment comprises forming a shield layer having first and second recesses in first and second end regions which surround a central region; depositing first and second lead layers in the first and the second recesses; and forming a read sensor in the central region such that a first edge of the read sensor is positioned above an edge of the first lead layer and a second edge of the read sensor is positioned above an edge of the second lead layer.

Methods for defining the track width of magnetic head having a flat sensor profile

A method comprises depositing first and second lead layers in end regions which surround a central region; and forming a read sensor in the central region such that a first edge of the read sensor is disposed above an edge of the first lead layer and a second edge of the read sensor is disposed above an edge of the second lead layer. In one approach, first and second bias layers are deposited in end regions over the first and the second lead layers. The read sensor is formed in the central region such that the first edge of the read sensor is disposed above an edge of the first bias layer and the second edge of the read sensor is disposed above an edge of the second bias layer. Third and fourth bias layers are deposited adjacent the read sensor. Methods taking different approaches are also presented.

Methods for forming a reed sensor

A method for fabricating a magnetic head includes forming a first pole and a flux shaping layer in spaced relation to the first pole. A nonmagnetic layer is formed adjacent the flux shaping layer and positioned on an air bearing surface (ABS) side of the flux shaping layer. A tapered recess is created in the nonmagnetic layer, the taper of the recess increasing (i.e., becoming deeper) towards the flux forming layer. The recess is filled with a magnetic material. A probe layer is formed such that it is in electrical communication with the magnetic material filling the recess.

Method of manufacturing a magnetic head with flux shaping layer

A method for milling a structure. A single- or multi-layer resist having no undercut is added to a surface of a structure to be milled, the surface to be milled defining a plane. A milling process, such as ion milling, is performed. The milling process includes milling the structure at high incidence and milling the structure at razing incidence. The milling process can be performed only once, or repeated multiple times. High incidence can be defined as about 65 to about 90 degrees from the plane of the surface being milled. Razing incidence can be defined as about 0 to about 30 degrees from the plane of the surface being milled.

Method of fabricating electronic component using resist structure with no undercut

A a method for fabricating a structure, such as a magnetic head, having two coplanar metallic features of different compositions, both deposited on their own seed layers. The features may be made tall relative to their widths (ie. have a high aspect ratio), and are also very closely spaced. Only a single high-definition, critically aligned photolithographic procedure is used to create the critical structures, avoiding any problem with aligning features produced by multiple procedures. The method is applied to the production of the write structure of a magnetic read/write head, where a portion of the pole structure and the inductive coils are fabricated in the same plane with a close spacing and both having a vertical aspect ratio of more than about 2:1.

High aspect ratio co-planar structure fabrication consisting of different materials

A perpendicular magnetic head including a media heating element that is fabricated within the magnetic head structure. The heating element is preferably fabricated above the first magnetic pole layer close to the ABS surface of the head. In one embodiment, following the fabrication of the heating element, a second magnetic pole probe layer that includes the second magnetic pole tip is fabricated. In an alternative head embodiment, a second magnetic pole shaping layer is fabricated upon the heating element, followed by the fabrication of the probe layer that includes the second magnetic pole tip. The heating element is an electrically resistive heating element that is preferably comprised of NiCr or NiFe.

Perpendicular magnetic head having thermally assisted recording element

A method for manufacturing a pole tip structure for a magnetic head is provided. An etch stop layer is initially deposited after which a transfer layer is deposited. Further deposited is at least one masking layer. Reactive ion etching is then performed to define a trench in at least the transfer layer. A pole tip layer is then deposited in the trench to define a pole tip structure flanked at least in part by the transfer layer. A surface of the transfer layer or etch stop layer then remains in co-planar relationship with a surface of the pole tip structure.

Planarized perpendicular pole tip system and method for manufacturing the same

The present invention is a side-by-side inductive head structure having a considerably reduced separation between the read and write elements of the head structure for parallel as well as longitudinal recording.

Method and apparatus for a side-by-side thin film head with minimal separation between the read and write structures

A magnetic head including a media heating device that is fabricated within the magnetic head structure. The media heating device includes an electrically resistive element that is fabricated above the first magnetic pole layer close to the ABS surface of the head. A Ppole pedestal is fabricated above the heating element. Electrical insulation layers are fabricated beneath and above the heating element to prevent electrical shorting to the Ppole layer and the Ppole pedestal that are disposed beneath and above the heating element, respectively.

Magnetic head having thermally assisted recording device, and method of fabrication thereof

Method for forming a magnetic head having a flux shaping layer

A method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure. The method uses an aligned process where the base plate imprint is fabricated on an electrically insulating layer and the reversed image is fabricated and etched into the coil insulation material, e.g., hard bake photoresist to alleviate the problems associated with complete ion removal of the seed layer between high aspect ratio coils. The method would also not be prone to plating non-uniformities (voids), and would not be subject to seed layer undercutting in a wet etch step process.

Method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure

The present invention is a magnetic head having a helical induction coil and includes hard disk drive devices that utilize the magnetic head. The helical coil is fabricated around a magnetic pole yoke in a series of process steps that include a reactive ion etch (RIE) process step which is utilized to simultaneously form vertical interconnect vias and upper helical coil member trenches. Thereafter, in a single fabrication step, such as by electroplating, the vertical interconnect lines and the upper helical coil traces are created in a single fabrication step, such that they are integrally formed. The vertical interconnect lines provide an electrical connection between outer ends of previously formed lower helical coil traces and outer ends of the integrally formed upper helical coil traces, such that a helical coil is fabricated. In the preferred embodiment, the helical coil is composed of copper.

Magnetic head having write head with helical coil and method for fabrication thereof

A magnetic head having improved overwrite capabilities and reduced fringing fields are described along with methods of making the same. The magnetic head has a first pole piece and a second pole piece. The first pole piece includes a first bottom pole piece layer, a pedestal portion formed over the first bottom pole piece layer, and a notched top pole portion formed over the pedestal portion. A gap layer separates the second pole piece from the notched top pole portion. The pedestal portion has a first saturation magnetization Mand the top pole portion has a second saturation magnetization Mthat is greater than the first saturation magnetization M. The top pole portion has a substantially planar top surface over which a portion of the gap layer and the second pole piece are formed.

Magnetic head having a bilayer pole tip

Following the deposition of an insulation layer, a patterned P2 pole tip seed layer is deposited. Significantly, the pole tip seed layer is not deposited beneath the induction coil area of the magnetic head. A dielectric layer is next deposited and a patterned RIE etching mask that includes both a P2 pole tip trench opening and an induction coil trench opening is fabricated upon the dielectric layer. Thereafter, in a single RIE etching step, the P2 pole tip trench is etched through the dielectric material down to the seed layer, and the induction coil trench is etched through the dielectric material down to the insulation layer. The P2 pole tip is first electroplated up into its trench, an induction coil seed layer is next deposited, and the induction coil is then electroplated up into the induction coil trench.

Method of making magnetic head having narrow pole tip and fine pitch coil

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San Jose, CA, United States of America

Hugo Alberto Emilio Santini