Lambda Physik Ag

Xtreme Technologies Gmbh

Lambada Physik Gmbh

Hubertus Von Bergmann

Spencer Merz

Andreas Targsdorf

Rainer Desor

Sergei V Govorkov

Juergen Kleinschmidt

Gongxue Hua

Dirk Basting

Vladimir Korobochko

Denis Bolshukhin

Lutz Dippmann

The invention is directed to an arrangement for generating pulsed currents for gas discharge pumped radiation sources, particularly with high repetition rates and high current strengths for generating plasma emitting EUV radiation. The object of the invention, to find a novel possibility for generating pulsed high-energy currents for a gas discharge pumped radiation source which permits a stable generation of high voltage and a reliable resetting of voltage using simple circuitry, is met according to the invention in that the charging circuit is an LC inversion charging circuit which communicates with a DC voltage source that provides only one half of the high voltage required for the gas discharge, wherein the inversion charging circuit has a capacitor bank with a first capacitor arranged directly parallel to the DC voltage source and a second capacitor which contributes after simultaneous charging to the recharging of the first capacitor by a triggered switch by a saturable recharging inductor for recharging the first capacitor, as a result of which the full high voltage required for discharging is provided in the capacitor bank.

Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources

An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pulser to be run without oil cooling. This relatively low voltage can be increased to the necessary voltage level, such as on the order to 12 kV to 15 kV, needed to drive the laser system. This transference can be accomplished using standard components, such as a pair of capacitor elements that are pulse-charged in parallel, but can be discharged in series following a reversal of charge on one of the capacitor elements.

Reduced-maintenance excimer laser with oil-free solid state pulser

An isolation means used in conjunction with supplying energy to a laser, which isolates a power supply from the pulser circuit, and commutates a switch which activates the discharge of energy to the laser.

Magnetic switch controlled power supply isolator and thyristor commutating circuit

A pulser with solid dielectrics including a pulse compressor and pulse transformer apparatus, which is able to produce short bursts of electrical energy at high voltage utilizing a coaxial structure. Both the transformer and the compressor utilize ferromagnetic cores having an inner and an outer diameter, and isolating members of similar geometry. The cores and ceramic members are held in place using conducting plates and bus bars. The overall structure of the compressor and the transformer is built around a central axis.

Coaxial laser pulser with solid dielectrics

Magnetic switch controlled power supply isolator and thyristor

An apparatus and method for providing accurate sub-nanosecond timing control between the voltage outputs of branches of an excitation circuit which are driven by a common switch. This invention allows for the introduction of variable timing delays between the branches of the circuit, and eliminates relative timing jitter. Using saturable inductors with variable bias in the high-voltage excitation circuit, this invention provides a continuously tuneable delay on the subnanosecond time scale between two or more excitation circuit branches.

Precision variable delay using saturable inductors

Growing community of inventors

Stellenbosch, South Africa

Hubertus Von Bergmann