Asml Netherlands B.v.

Carl Zeiss Smt Gmbh

Hubertus Renier Maria Van Lierop

Alexander Petrus Josephus Van Lankvelt

Ahmet Levent Avsar

Erik Roelof Loopstra

Franciscus Maria Joannes Linssen

Galip Tuna Turkbey

A vibration isolator () for supporting a payload and isolating the payload from vibrations has: a pressurized gas compartment () formed with a rigid base structure (), which base structure has an opening () covered with a flexible membrane () having an inner surface () facing into the gas compartment and an outer surface () facing in the opposite direction, a support member () for supporting the payload, which support member is arranged in contact with the outer surface () of the membrane, and a clamping member () arranged at the inner surface () of the membrane, wherein the support member and the clamping member form a clamping system (), which system includes at least one magnetic element () effecting the membrane to be pressed against the support member.

Vibration isolator for supporting a payload

A vibration isolation system including a support, a forward actuator and a return device. The support is for supporting the body on a base. The support has a body engaging surface and a base engaging surface. The base engaging surface is arranged to couple to the base. The support couples the body engaging surface to the body in a coupled state. The support uncouples the body engaging surface from the body in an uncoupled state. The forward actuator moves the body and the body engaging surface together relatively to the base in a first direction from a first initial position to an end position in the coupled state. The return device is configured to move the body engaging surface relatively to the body opposite to the first direction from the end position to a second initial position in the uncoupled state.

Vibration isolation system and lithographic apparatus

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Weert, Netherlands

Hubertus Renier Maria Van Lierop