Other

Hubert Lachner

Norbert Schwesinger

Sebastian Pobering

Sandy Zaehringer

Michael Foerg

Michael Förg

A piezoelectric actuator is provided which acts as a micromechanical actuating element. Thus, the piezoelectric actuator has a piezoelectric element and an electrode structure, wherein said electrode structure is arranged with the electrodes thereof exclusively on one side of the piezoelectric element. Furthermore, the piezoelectric actuator has at least one attachment element, wherein the attachment element is fitted on the piezoelectric element and on the side of the electrode structure of the piezoelectric element, and the attachment element at least partially encompasses the electrode structure of the piezoelectric actuator. The attachment element in the process, by virtue of encompassing the electrode structure, provides a physical limit for the expansion of the piezoelectric element.

Piezoelectric actuator

The invention relates to a piezoelectric drive, in particular for microvalves. The drive comprises a deformation layer coupled on one side to a piezoelectric layer, which is provided with at least one pair of electrodes, made of two electrodes of opposite polarities, to provide electricity. According to the invention, both electrodes of opposite polarities of the pair of electrodes are arranged together on the side of the piezoelectric layer facing away from the deformation layer. The invention also relates to a microvalve comprising at least one valve channel and a membrane that opens or closes the valve channel, where the membrane simultaneously forms the deformation layer of such a piezoelectric drive.

Growing community of inventors

Munich, Georgia

Hubert Lachner