Fuji Seiki Inc.

Vse Vacuum Technology

Hubert Boesch

Tsutomu Taniguchi

Stefan Boesch

A vacuum valve with a seating ring having a generally rectangular cross section. With respect to rectangular edges lying diametrically opposite one another, radii of curvature are arranged in these edges, which radii of curvature come into sealing engagement with sealing seats arranged lying opposite one another on the housing side and the disk side. The sealing surfaces on the sealing seats have approximately the same cone angle. The sealing ring is easy to produce, has a small rolling path and there is no danger of damage to the valve seats by the sealing ring.

Vacuum valve with a sealing ring

A valve operating mechanism produces a rotating force for causing a valve body of the valve to shift relative to a valve seat thereof, so that the valve is opened and closed. A piston of the mechanism produces a rectilinear reciprocating force. A screw member is supported moveably along the rectilinear line and unrotatably in the housing and includes a pair of pawls helically projecting along the rectilinear line and a helical interval space defined between the helical pawls. A pivot is inserted into the helical interval space. A cylindrical rotating member is supported rotatably and unmoveably along the rectilinear line in the housing so as to surround the screw member. When the screw member receives the rectilinear reciprocating force to perform the reciprocating motion along the rectilinear line, the pivot is urged to rotate along the helical interval space in the rectilinearly unmoved state, and the cylindrical rotating member can rotate with the pivot. Therefore the cylindrical rotating member can output the rotating force for causing the valve body of the valve to shift relative to the valve seat thereof.

Growing community of inventors

Lustenau, Austria

Hubert Boesch