Stmicroelectronics Gmbh

Stmicroelectronics S.r.l.

Stmicroelectronics International N.v.

Huantong Zhang

David C McClure

Carlo Valzasina

Gert Ingvar Andersson

Yamu Hu

Deyou Fang

Matteo Fabio Brunetto

Naren K Sahoo

Nils Einar Hedenstierna

Erik Daniel Svensson

A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.

MEMS gyroscope self-test using a technique for deflection of the sensing mobile mass

A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate

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Coppell, TX, United States of America

Huantong Zhang