Taiwan Semiconductor Manufacturing Comp. Ltd.

Huan-Lisng Tzeng

Chia-Chi Chung

Yao-Pin Yang

Chen-Chun Yan

Kuo-Yen Chang

In an embodiment, a system includes: a base with a bore hole, wherein the base is configured to secure a wafer at a first position on the base; a pin extending through the bore hole; a focus ring horizontally surrounding the wafer at the first position and extending upwardly from the base, wherein the wafer is configured to be moved vertically between the first position and a second position above the focus ring via the pin; and a slit valve above the focus ring, wherein the wafer is configured to be moved horizontally between the second position and the slit valve via a robotic arm.

Systems and methods for fixed focus ring processing

In some embodiments, a maintenance apparatus is provided for maintaining semiconductor processing equipment. The maintenance apparatus has an articulated member having a first member with a handle engagement portion and a second member with a first tool engagement portion. The first member is rotationally coupled to the first member about an articulation axis. A first tool member in selective engagement with the first tool engagement portion of the second member.

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Hsinchu, Taiwan

Huan-Lisng Tzeng