Taiwan Semiconductor Manufacturing Comp. Ltd.

Huai-Jen Tung

Keng-Ying Liao

Chi-Chung Jen

Yu-Chu Lin

Yen-Jou Wu

Chih Wei Sung

Po-zen Chen

Yu-chien Ku

S S Wang

Yu-Chien Ku

Yung-Lung Yang

Tsun-kai Tsao

Shih Sian Wang

A device is disclosed. The device includes a plurality of pixels disposed over a first surface of a semiconductor layer. The device includes a device layer disposed over the first surface. The device includes metallization layers disposed over the device layer. One of the metallization layers, closer to the first surface than any of other ones of the metallization layers, includes at least one conductive structure. The device includes an oxide layer disposed over a second surface of the semiconductor layer, the second surface being opposite to the first surface, the oxide layer also lining a recess that extends through the semiconductor layer. The device includes a spacer layer disposed between inner sidewalls of the recess and the oxide layer. The device includes a pad structure extending through the oxide layer and the device layer to be in physical contact with the at least one conductive structure.

Image sensor device and methods of forming the same

A method includes forming a dielectric layer over a first surface of a semiconductor layer, the dielectric layer including a metallization layer. The method includes forming an opening to expose a portion of the dielectric layer. The method includes forming a buffer oxide layer lining the opening. The method includes forming, according to a patternable layer, a recess in the buffer oxide layer partially extending from a second surface of the buffer oxide layer. The method includes removing the patternable layer. The method includes extending the recess through the buffer oxide layer and a portion of the dielectric layer to expose a portion of the metallization layer. The method includes filling the recess with a conductive material to form a pad structure configured to provide electrical connection to the metallization layer.

Methods for forming image sensor devices

Growing community of inventors

Hsinchu, Taiwan

Huai-Jen Tung