United Microelectronics Corp.

Hsuan-Hsu Chen

Chun-Lung Chen

Feng-Yi Chang

Chieh-Te Chen

Lung-En Kuo

Jiunn-Hsiung Liao

Zhen Wu

Chen-Yi Weng

Yu-Tsung Lai

Po-Wen Su

Ying-Chih Lin

Chuan-Chang Wu

Chien-Ting Lin

Ssu-I Fu

Yu-Ping Wang

Shyh-Fann Ting

Shih-Hung Tsai

Jyh-Shyang Jenq

Yu-Hsiang Lin

Chih-Wei Chen

Chih-Wei Kuo

Shih-Chieh Hsu

Chien-Hao Chen

Chih-Chiang Wu

Ying-Tsung Chen

Po-Lun Cheng

Yi-Wei Tseng

Kun-Chen Ho

Yi-Han Ye

Chu-Yin Tseng

Pei-Jou Lee

Shih-Hung Chen

Ching-Wen Hung

Chih-Sen Huang

Chung-Yi Chiu

Yi-Tyng Wu

Li-Chiang Chen

Shang-Yuan Tsai

Ching-Pin Hsu

Chien-hua Tsai

Chung Yi Chiu

Chih-Hung Cheng

Ming-Da Hsieh

Cheng-Hsing Chuang

Huai-Hsuan Tsai

Shun-Yu Huang

Meng-Chun Lee

Yi-Xiang Chen

Liang Ju Wei

A method for fabricating semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) on a substrate and a top electrode on the MTJ; forming a first inter-metal dielectric (IMD) layer around the MTJ and the top electrode; forming a stop layer on the first IMD layer; forming a second IMD layer on the stop layer; performing a first etching process to remove the second IMD layer and the stop layer; performing a second etching process to remove part of the top electrode; and forming a metal interconnection to connect to the top electrode.

Semiconductor device and method for fabricating the same

A control method of a multi-stage etching process and a processing device using the same are provided. The control method of the multi-stage etching process includes the following step S. A stack information of a plurality of hard mask layers is set. An etching target condition is set. Through a machine learning model, a parameter setting recipe of the hard mask layers is generated under the etching target condition. The machine learning model is trained based on the stack information of the hard mask layers, a plurality of process parameters and a process result.

Control method of multi-stage etching process and processing device using the same

A method of fabricating an MTJ device is provided including the following process. A first via is formed in the first dielectric layer. A first electrode layer is formed on the first dielectric layer and the first via. An MTJ stack layer is formed on the first electrode layer. A patterned second electrode layer is formed on the MTJ stack layer and used as a mask. A first ion beam etching process is performed to etch the patterned second electrode layer and pattern the MTJ stack layer and the first electrode layer to form a second electrode, an MTJ stack structure, and a first electrode. A first protective layer is formed to cover the second electrode and the MTJ stack structure. A second ion beam etching process is performed to remove a portion of the MTJ stack structure and a portion of the first electrode.

Method of fabricating magnetic tunneling junction device

A magnetic memory including a substrate, a spin-orbit torque (SOT) layer, a magnetic tunnel junction (MTJ) stack, a first protection layer, and a second protection layer is provided. The SOT layer is located over the substrate. The MTJ stack is located on the SOT layer. The first protection layer and the second protection layer are located on the sidewall of the MTJ stack. The first protection layer is located between the second protection layer and the MTJ stack. There is a notch between the second protection layer and the SOT layer.

Magnetic memory and manufacturing method thereof

A method for a clean procedure during manufacturing a semiconductor device, includes: providing a patterned sacrificial gate structure including a gate dielectric and a sacrificial layer; wherein the patterned sacrificial gate structure is embedded in a dielectric layer and an upper surface of the sacrificial layer is exposed; performing a first etching process to remove the sacrificial layer; and performing a hydrophilic treatment and a hydrophobic treatment to remove a residue of the sacrificial layer.

Method for clean procedure during manufacturing semiconductor device

A manufacturing method of a semiconductor device includes the following steps. First patterned structures are formed on a substrate. Each of the first patterned structures includes a first semiconductor pattern and a first bottom protection pattern disposed between the first semiconductor pattern and the substrate. A first protection layer is formed on the first patterned structures and the substrate. A part of the first protection layer is located between the first patterned structures. A first opening is formed in the first protection layer between the first patterned structures. The first opening penetrates the first protection layer and exposes a part of the substrate. A first etching process is performed after forming the first opening. A part of the substrate under the first patterned structures is removed by the first etching process for suspending at least a part of each of the first patterned structures above the substrate.

Semiconductor device

Semiconductor device and manufacturing method thereof

A semiconductor structure and a manufacturing method for the same are disclosed. The semiconductor structure includes a first gate structure, a second gate structure and a second dielectric spacer. Each of the first gate structure and the second gate structure adjacent to each other includes a first dielectric spacer. The second dielectric spacer is on one of opposing sidewalls of the first gate structure and without being disposed on the dielectric spacer of the second gate structure.

Semiconductor structure and manufacturing method for the same

A sidewall image transfer (SIT) process is provided. First, a substrate is provided. A sacrificial layer having a pattern is formed on the substrate. A first measuring step is performed to measure a width of the pattern of the sacrificial layer. A material layer is formed conformally on the sacrificial layer, wherein a thickness of the material layer is adjusted according to the result of the first measuring step. Then, the material layer is removed anisotropically, so the material layer becomes a spacer on a sidewall of the sacrificial layer. Lastly, the sacrificial layer is removed.

Sidewall image transfer process

A method of performing an etching process is provided. A substrate is provided, wherein a first region and a second region are defined on the substrate, and an overlapping region of the first region and the second region is defined as a third region. A tri-layer structure comprising an organic layer, a bottom anti-reflection coating (BARC), and a photoresist layer is formed on the substrate. The photoresist layer and the BARC in the second region are removed. An etching process is performed to remove the organic layer in the second region by using the BARC and/or the photoresist layer as a mask, wherein the etching process uses an etchant comprises CO.

Method of performing etching process

A semiconductor device with a self-aligned contact and a method of manufacturing the same, wherein the method comprises the step of forming a 1st dielectric layer on gate structures, form a self-aligned contact trench between two gate structures, forming an 2nd dielectric layer on the 1st dielectric layer and in the self-aligned contact trench; patterning the 2nd dielectric layer into a 1st portion on the 1st dielectric layer and a 2nd portion filling in the self-aligned contact trench, using the 2nd dielectric layer as a mask to etch the 1st dielectric layer, and forming a metal layer and a self-aligned contact simultaneously in the 1st dielectric layer and in the self-aligned contact trench.

Semiconductor device with self-aligned contact and method of manufacturing the same

The present invention provides a non-planar FET which includes a substrate, a fin structure, a sub spacer, a gate, a dielectric layer and a source/drain region. The fin structure is disposed on the substrate. The sub spacer is disposed only on a middle sidewall of the fin structure. The gate is disposed on the fin structure. The dielectric layer is disposed between the fin structure and the gate. The source/drain region is disposed in the fin structure. The present invention further provides a method of forming the same.

Manufacturing method of non-planar FET

A method for forming a semiconductor structure having an opening is provided. First, a substrate is provided, wherein a first region and a second region are defined on the substrate and an overlapping area of the first region and the second region is defined as a third region. A pattern density of the first region is substantially greater than that of the second region. Then, a material layer is formed on the substrate. A first hard mask and a second hard mask are formed on the material layer. The first hard mask in the first region is removed to form a patterned first hard mask. The second hard mask in the third region is removed to form a patterned second hard mask. Lastly, the material layer is patterned by using the patterned second hard mask layer as a mask to form at least an opening in the third region only.

Method for forming semiconductor structure having opening

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Tainan, Taiwan

Hsuan-Hsu Chen