Taiwan Semiconductor Manufacturing Comp. Ltd.

Hsu Tung Yen

Ling-Sung Wang

Chen-Chieh Chiang

Kun-Ei Chen

Bo Hsiang Huang

A system for monitoring a wafer carrier includes an overhead hoist transport (OHT) vehicle, a scanner, and a processer. The OHT vehicle is configured to transport the wafer carrier along a vertical direction. The scanner is disposed below the OHT vehicle, wherein the wafer carrier is transported vertically by the OHT vehicle to pass through the scanner, and the scanner at least scans a lower portion of the wafer carrier along a horizontal direction and an upper portion of the wafer carrier along the horizontal direction. The processor is coupled to the scanner, wherein the processer receives a scanning result from the scanner after the wafer carrier is scanned, and the scanning result includes information of a gas composition within the wafer carrier. A method of manufacturing a semiconductor structure including a scanning procedure is also provided.

System for monitoring wafer carrier and method of manufacturing semiconductor structure

A work piece holder provided herein includes a support baffle and an elevating element. The support baffle extends along an arc path. The elevating element is disposed on the support baffle and is pivoted to be movable between an unlock status and a lock status.

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Hsinchu, Taiwan

Hsu Tung Yen