Vanguard International Semiconductor Corporation

Hsiung-Shih Chang

Jui-Chun Chang

Chia-Hao Lee

Manoj Kumar

Pei-Heng Hung

Li-Che Chen

Tsung-Hsiung Lee

Chih-Jen Huang

Chih-Cherng Liao

Shang-Hui Tu

Jun-Wei Chen

Priyono Tri Sulistyanto

Teng-Shao Su

Yen-Ni Lee

A trench isolation structure is provided. The trench isolation structure includes a substrate. A polygonal trench is disposed in the substrate. An insulating material is disposed in the polygonal trench, and a polygon top-side contact structure is disposed in the polygonal trench and surrounded by the insulating material. The polygon top-side contact structure has the same shape as the polygonal trench from a top view. A method for forming the trench isolation structure is also provided.

Trench isolation structures and methods for forming the same

A method for manufacturing a semiconductor device includes forming a first well region in a semiconductor substrate, forming isolation structures on the semiconductor substrate, and forming second well regions and a third well region in the first well region, wherein the second well regions are isolated from the third well region by the isolation structures, and two of the adjacent second well regions have a first distance between them. The method also includes performing a rapid thermal annealing process to shorten the first distance to a second distance. The method further includes forming first barrier metal layers on the first well region and covering the second well regions, forming a second barrier metal layer on the first well region and covering the third well region, forming first electrodes on the first barrier metal layers, and forming a second electrode on the second barrier metal layer.

Schottky diode with dielectrically isolated diffusions, and method of manufacturing the same

A semiconductor device including a substrate having an active region and a field-plate region therein is disclosed. At least one trench-gate structure is in the substrate. The field-plate region is at a first side of the trench-gate structure. At least one source doped region is in the substrate at a second side opposite to the first side of the trench-gate structure. The source doped region adjoins the sidewall of the trench-gate structure. A drain doped region is in the substrate corresponding to the active region. The field-plate region is between the drain doped region and the trench-gate structure. An extending direction of length of the trench-gate structure is perpendicular to that of the drain doped region as viewed from a top-view perspective.

Trench-gate semiconductor device and method for forming the same

A semiconductor device is disclosed. The device includes an epitaxial layer on a substrate, wherein the epitaxial layer includes first trenches and second trenches alternately arranged along a first direction. The epitaxial layer between the adjacent first and second trenches includes a first doping region and a second doping region, and the first doping region and the second doping region have different conductivity types. An interface is between the first doping region and the second doping region to form a super-junction structure. A gate structure is on the epitaxial layer. The epitaxial layer under the gate structure includes a channel extending along a second direction, and the first direction is perpendicular to the second direction.

Method for forming semiconductor device having super-junction structures

The invention provides a semiconductor device, including a buried oxide layer disposed on a substrate. A semiconductor layer is disposed on the buried oxide layer. A first well is disposed in the semiconductor layer. A second well and a third well are disposed to opposite sides of the first well and separated from the first well. An isolation feature covers the first well and the third well. A poly field plate is disposed on the isolation feature and over the semiconductor layer between the first well and the third well. A first anode doped region is disposed on the second well. A second anode doped region and a third anode doped region are disposed on the second well. The second anode doped region is positioned directly on the third anode doped region. A first cathode doped region is coupled to the third well.

Semiconductor device having field plate disposed on isolation feature and method for forming the same

The invention provides a semiconductor device. The semiconductor device includes a buried oxide layer disposed on a substrate. A semiconductor layer having a first conduction type is disposed on the buried oxide layer. A first well doped region having a second conduction type is disposed in the semiconductor layer. A cathode doped region having the second conduction type is disposed in the first well doped region. A first anode doped region having the first conduction type is disposed in the first well doped region, separated from the cathode doped region. A first distance from a bottom boundary of the first anode doped region to a top surface of the semiconductor layer is greater than a second distance from the bottom boundary to an interface between the semiconductor layer and the buried oxide layer.

Semiconductor device

A semiconductor device includes a plurality of first wires and second wires, a first conductive layer, and a second conductive layer. Each of the first wires forms a closed polygon and surrounds a center, and each of the second wires forms the closed polygon and surrounds the center. The first and second wires are interlaced, and none of the first and second wires are coupled to each other. The first conductive layer, having an entire surface structure, is disposed on the first and second wires and coupled to the first wires. The second conductive layer, having an entire surface structure, is disposed on the first and second wires and coupled to the second wires. The first conductive layer is disposed between the second conductive layer and the first and second wires, and the first and second conductive layers are not coupled to each other.

Efficient layout placement of a diode

A vertical diode is provided. The vertical diode includes a high-voltage N-type well region in a substrate, and two P-doped regions spaced apart from each other in the high-voltage N-type well region. The vertical diode also includes an N-type well region in the high-voltage N-type well region, and an N-type heavily doped region in the N-type well region. A plurality of isolation structures are formed on the substrate to define an anode region and a cathode region. There is a bottom N-type implanted region under the high-voltage N-type well region corresponding to the anode region. The bottom N-type implanted region directly contacts or partially overlaps the high-voltage N-type well region. A method for fabricating a vertical diode is also provided.

Vertical diode and fabrication method thereof

A semiconductor device includes a plurality of first wires and a plurality of second wires. Each of the first wires forms a closed polygon and surrounds a center. Each of the second wires is forming the closed polygon and surrounding the center. The first and second wires are interlaced, and none of the first wires and second wires are coupled to each other.

The invention provides a semiconductor device, including a buried oxide layer disposed on a substrate. A semiconductor layer having a first conduction type is disposed on the buried oxide layer. A first well region having the first conduction type is disposed in the semiconductor layer. A second well and a third well having a second conduction type are disposed to opposite sides of the first well region. The second well and the third well are separated from the first well region. A first anode doped region is disposed in the second well. A second anode doped region and a third anode doped region having the first conduction type are disposed in the second well. The second anode doped region is positioned directly on the third anode doped region. A first cathode doped region is coupled to the third well.

Semiconductor device having super-junction structures

A semiconductor device includes: a plurality of stacked semiconductor layers; a plurality of composite doped regions separately and parallelly disposed in a portion of the semiconductor layers along a first direction; a gate structure disposed over a portion of the semiconductor layers along a second direction, wherein the gate structure covers a portion of the composite doped regions; a first doped region formed in the most top semiconductor layer along the second direction and being adjacent to a first side of the gate structure; and a second doped region formed in the most top semiconductor layer along the second direction and being adjacent to a second side of the gate structure opposite to the first side thereof.

Semiconductor device and method for fabricating the same

A top-side contact structure is provided. The top-side contact structure includes a substrate. The substrate includes a first semiconductor layer, an insulating layer on the first semiconductor layer, and a second semiconductor layer on the insulating layer. The top-side contact structure also includes a first trench and a second trench formed in the second semiconductor layer and respectively extending along a first direction and a second direction. The first trench and the second trench connect to each other at an intersection point. The top-side contact structure also includes an insulating material filling the first trench and the second trench. The top-side contact structure also includes a contact plug formed at the intersection point and directly contacting the first semiconductor layer. A method for fabricating a top-side contact structure is also provided.

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Taichung, Taiwan

Hsiung-Shih Chang