Taiwan Semiconductor Manufacturing Comp. Ltd.

United Microelectronics Corp.

Hsiu-Ming Yeh

Chih-I Peng

Yi-Chang Liu

Feng-Inn Wu

Min-Chia Wang

Chung-Ming Lin

Chia-Wei Ho

A current generator includes a startup circuit and a bandgap reference circuit coupled to the startup circuit. The startup circuit is for generating a first voltage. The bandgap reference circuit is for generating a second voltage. The bandgap reference circuit includes an operational amplifier. The operational amplifier includes a bias source circuit and a bias generator circuit. The bias source circuit is for generating a reference current according to the first voltage and the second voltage. The bias generator circuit is for generating bias voltages according to the reference current. The startup circuit and the bandgap reference circuit receive a supply voltage.

Current generator with reduced power consumption

A method for processing a semiconductor wafer is provided. The method includes polishing the semiconductor wafer with a chemical mechanical polishing (CMP) tool. The method includes transferring the polished semiconductor wafer to an interface tool from the CMP tool. The method includes discharging a mist spray over the polished semiconductor wafer in the interface tool. The method includes transferring the semiconductor wafer form the interface tool to a cleaning tool for a cleaning process.

Method and system for chemical mechanical polishing process

A word line driving circuit includes a first circuit and a second circuit. The first circuit is configured to provide a first word line driving voltage and a second word line driving voltage based on a first control signal, a second control signal, a first bias voltage, a second bias voltage and a base voltage. The second circuit is configured to provide the first control signal and the second control signal based on a third control signal, a fourth control signal, a word line control signal, a reverse word line control signal, the first bias voltage, the second bias voltage and the base voltage. The first bias voltage and the second bias voltage have different levels during the read mode and the program mode for adaptively adjusting the read voltage and the program voltage, thereby improving the data access time.

Word line driving circuit with high access efficiency

A system for performing a chemical mechanical polishing (CMP) process is provided. The system includes a CMP tool configured to polish a semiconductor wafer. The processing system further includes a wafer stage configured to support the semiconductor wafer for facilitating the insertion of the semiconductor wafer into, and its subsequent removal from, the CMP tool. The processing system also includes a number of spray nozzles positioned relative to the wafer stage. In addition, the processing system includes a spray generator connected to the spray nozzles and configured to convert a mixture to a mist spray. The processing system further includes a controller configured to activate flow of the mist spray from the spray generator to the spray nozzles to discharge the mist spray over the semiconductor wafer supported by the wafer stage.

Apparatus for chemical mechanical polishing process

A method for processing a semiconductor wafer is provided. The method includes transferring the semiconductor wafer from an interface tool to a Chemical Mechanical Polishing (CMP) tool. The method further includes polishing the semiconductor wafer with the CMP tool. The method also includes transferring the semiconductor wafer back to the interface tool from the CMP tool. In addition, the method includes converting a mixture to a mist spray and discharging the mist spray over the semiconductor wafer in the interface tool after the semiconductor wafer is polished by the CMP tool.

Method and apparatus for chemical mechanical polishing process

A method of using a chemical mechanical polishing (CMP)apparatus that includes a apparatus is provided. The method includes providing a conditioning disc for conditioning the polishing pad, where the conditioning disc includes a plurality of portions of subsystem discs. The portions may be regions of the disc that are concentric. Each portion of the disc is operable to rotate at a different angular velocity. In some embodiments, a different applied loading is provided to each of the portions of the disc in addition to or in lieu of the different angular velocities.

Method of CMP pad conditioning

A chemical mechanical polishing (CMP) apparatus is provided that includes a conditioning disc for conditioning a polishing pad of the CMP apparatus. The conditioning disc includes a plurality of portions of subsystem discs. The portions may be regions of the disc that are concentric. Each portion of the disc is operable to rotate at a different angular velocity. In some embodiments, a different applied loading is provided to each of the portions of the disc in addition to or in lieu of the different angular velocities.

Growing community of inventors

Hsinchu, Taiwan

Hsiu-Ming Yeh