Taiwan Semiconductor Manufacturing Comp. Ltd.

Hsiu Hao Hsu

Yi-Ming Lin

Sheng-Chun Yang

Chao-Hung Wan

Po-Wei Liang

Guan Jung Chen

A humidity-controlled storage device includes a plurality of panels configured to form an enclosed volume. A first panel of the plurality of panels includes inlet and outlet ports. The storage device further includes a purge system with a gas inlet pipe, a gas supply system, and a gas extraction system. The gas inlet pipe includes a nozzle and a cylindrical portion coupled to the inlet port. The gas supply system is configured to supply a purge gas to the gas inlet pipe. The gas inlet pipe is configured to output the purge gas into the enclosed volume in a direction that creates a circular or an oval gas flow pattern within the enclosed volume. The gas extraction system is coupled to the outlet port and is configured to extract the purge gas from the enclosed volume.

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Hsinchu, Taiwan

Hsiu Hao Hsu