United Microelectronics Corp.

Hsing-Sheng Yang

Eric Chu

Hung-Hsien Chang

Chin-Wen Chung

To-Yao Hsu

A cassette holder is positioned within cleaning equipment. The cleaning equipment includes a solution tank, at least one pipe positioned on an internal wall of the solution tank, and a cassette in which at least one semiconductor wafer is placed. The cassette holder has a loading plate in the solution tank for holding the cassette. Pluralities of guide blocks mounted on the loading plate prevent movement of the cassette. A side-frame is positioned at an end of the loading plate proximate to the pipe. The bottom of the loading plate has a plurality of neck feet, and each neck foot is covered by a first tube that enhances support strength of the neck foot. The cassette holder further includes at least one weight to overcome buoyancy.

Growing community of inventors

Hsin-Chu, Taiwan

Hsing-Sheng Yang