Average Co-Inventor Count = 1.00
ph-index = NA
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (1 from 40,850 patents)
1 patent:
1. 12476150 - Critical dimension uniformity (CDU) control method and semiconductor substrate processing system