Taiwan Semiconductor Manufacturing Comp. Ltd.

Hsiao-Yin Hsieh

Yeh-Chieh Wang

Chi-Hao Huang

Chin-Tsung Lin

Hong-Hsing Chou

Hong-Shing Chou

An apparatus for extending the useful life of an ion source, comprising an arc chamber containing a plurality of cathodes to be used sequentially and a plurality of repellers to protect cathodes when not in use. The arc chamber includes an arc chamber housing defining a reaction cavity, gas injection openings, a plurality of cathodes, and at least one repeller element. A method for extending the useful life of an ion source includes providing power to a first cathode of an arc chamber in an ion source, operating the first cathode, detecting a failure or degradation in performance of the first cathode, energizing a second cathode, and continuing operation of the arc chamber with the second cathode.

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Zhubei, Taiwan

Hsiao-Yin Hsieh