United Microelectronics Corp.

Hsiang Yang

Chen-Hua Tsai

Jian-Cheng Chen

Yao-Jen Fan

Heng-Kun Chen

Chin-Yueh Tsai

A semiconductor layout pattern includes a device layout pattern, a plurality of rectangular first dummy patterns having a first size, a plurality of rectangular second dummy patterns having second sizes, and a plurality of bar-like third dummy patterns having varied third sizes. The pattern densities are smartly equalized by positioning the second dummy patterns.

Dummy patterns

A method for generating dummy patterns includes providing a layout region having a layout pattern with a first density, inserting a plurality of first dummy patterns with a second density corresponding to the first density in the layout pattern, dividing the layout region into a plurality of sub-regions with a third density, adjusting a size of the first dummy pattern according to a difference between the second density and the third density, and outputting the layout pattern and the first dummy patterns on a photomask.

Dummy patterns and method for generating dummy patterns

A semiconductor layout pattern includes a device layout pattern, a plurality of rectangular first dummy patterns having a first size, a plurality of rectangular second dummy patterns having varied second sizes, and a plurality of first via dummy patterns smaller than the second dummy patterns and arranged in a spatial range within the second dummy patterns.

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Hsinchu County, Taiwan

Hsiang Yang