Schott Ag

Schott Glaswerke

Hrabanus Hack

Jochen Alkemper

Wolfgang Schmidbauer

Volker Paquet

Inka Henze

Joerg Schuhmacher

Hartmut Paschke

Torsten Gabelmann

Johannes Segner

Gerhard Weber

Hans-Joachim Schmitt

Lutz Aschke

Torsten Holdmann

Oliver Sohr

Rainer Haspel

Gerd Kreutzmann

A substrate, such as a glass, glass ceramic, ceramic or metal substrate, is provided with a thermocatalytically active coating on at least a part of the substrate surface. The thermocatalytic coating contains an inorganic lithium salt or organic lithium-containing compound in an amount that is equivalent to not less than 2 wt. % of lithium ions, based on total coating weight. The thermocatalytic coating has a glass, glass solder or sol-gel matrix in which the lithium salt or organic lithium-containing compound is introduced. Optional barrier and IR-reflecting layers are arranged between the substrate surface and the thermocatalytically active coating.

Thermocatalytically active coating, substrate having the thermocatalytically active coating at least in parts, and process for producing same

The invention discloses an SiO&#x2014;TiOglass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.

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The present invention relates to a substrate in particular of EUV microlithography, to the production of a substrate of this type and to the use of this substrate as a substrate for mirrors and/or masks or mask blanks in particular in EUV microlithography.

Substrates for in particular microlithography

A process for coating an exterior of a lamp is disclosed, which comprises performing the coating in a microwave reactor by a microwave plasma CVD process and coupling microwave radiation into the microwave reactor with a microwave power greater than or equal to a power threshold value at which a plasma with reduced microwave permeability is ignited in the microwave reactor.

Process for coating an exterior portion of a lamp

To lead an optical waveguide through a housing wall, the optical waveguide is, in one section freed of its protective layer and hermetically connected in a bushing by glass soldering it to the bushing. In at least one load-relieving section leading out of the bushing, the optical waveguide is fastened by its protective layer to an extension of the bushing. The bushing is hermetically set into the housing wall.

Process of and apparatus for leading an optical waveguide through a wall

A method of detecting defects present at the surface and/or internally in transparent materials, particularly of detecting included foreign bodies or bubbles in glass, is disclosed. The test material is scanned with an electromagnetic radiation of a single wavelength which is set to the penetration depth in the test material. The intensity reflected by the defects is picked up and analyzed. By this method only defects located up to a specified depth in the material are detected. Visible light as well as UV- or IR radiation may be applied. The associated test rig comprises a tunable Laser (2), a conveyor belt (6) carrying the test material (5), a fast rotating mirror-wheel (3) which directs the light beam (4) at high speed over the test material (5), and an optical sensor (7) connected with an analyzer unit (8).

Method and apparatus for detecting defects in transparent materials

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Mainz, Germany

Hrabanus Hack