Aoptix Technologies, Inc.

Kla-Tencor Technologies Corporation

Howard Dando

Siegfried Fleischer

Malcolm J Northcott

J Elon Graves

Srinivas Sivaprakasam

Santanu Basu

Chandrasekhar Pusarla

Joseph Shiran

Mehdi Vaez-Iravani

Guoheng Zhao

Christian Wolters

Alexander Belyaev

Paul Doyle

Yu Chun Chang

Glenn Scott Gibb, Jr

A free-space optical transceiver includes a repositionable mirror for receiving and sending light beams with another transceiver. To properly align the light beams, the position of the mirror is determined in using a position sensor. The position sensor is mounted within a base substructure that is coupled to a steerable mirror substructure containing the mirror. The position sensor reflects sensor light off of the mirror to determine the position of the mirror along two different axes. The position sensor includes an optical element for shaping the sensor light. The components of the position sensor are mounted to the base substructure such that alignment of the position sensor is not required. Further, by coupling the position sensor to the base substructure and not the steerable mirror substructure, the moment of inertia and center of gravity of the steerable mirror substructure is improved, thereby improving the steering responsiveness of the mirror.

Position sensor for a fast steering mirror

A stabilized ultra-high bandwidth capacity transceiver system that combines an E-band (71-76 GHz, 81-86 GHz) millimeter wave RF transceiver with an eye-safe adaptive optics Free Space Optical (FSO) transceiver as a combined apparatus for simultaneous point-to-point commercial communications. The apparatus has a high degree of assured carrier availability under stressing environmental conditions. The apparatus establishes and maintains pointing and stabilization of mmW RF and FSO optical beams between adjacent line of sight apparatuses. The apparatus can rapidly acquire and reacquire the FSO optical carrier link in the event the optical carrier link is impaired due to adverse weather.

Integrated commercial communications network using radio frequency and free space optical data communication

Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.

Stabilizing a substrate using a vacuum preload air bearing chuck

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Rio Del Mar, CA, United States of America

Howard Dando