Gca Corporation

Howard Byron Lovering

A relatively high percentage of the light given off by a source lamp is gathered by four collector lens systems disposed around the lamp. The desired wavelength components of the light gathered by each lens system are directed by a dichroic mirror toward the system axis and into a respective focusing lens system, while longer wavelengths are transmitted by each mirror to a heat sink. The light from each focusing lens system is directed to the entrance face of a respective sub-bundle of a fiber optic combining system. The entrance face of each sub-bundle is inclined off axis to receive the incident light. The sub-bundles then bend and join each other in alignment with the system axis to transmit the combined light to a single exit face.

High throughput illuminator

A system for exposing photoresists 'on-the-fly' is disclosed. The system incorporates a dye laser having an output pulse duration of less than about 250 nanoseconds to expose the photoresist while the photoresist is moving. Means are provided to synchronize the output of the laser to the motion of a photoresist coated surface and to insure spatial uniformity of energy across an object plane of an optical projection system.

Growing community of inventors

Bedford, MA, United States of America

Howard Byron Lovering