Georgia Tech Research Corporation

Hosein Ali Razavi

Fahrettin Levent Degertekin

Thomas R Kurfess

Byungki Kim

The present invention relates to microinterferometers and the application of such to profile surface geometries. A representative method for profiling a target surface of an object includes: illuminating the target surface with an incident light beam through a phase-sensitive, reflective diffraction grating, such that a first portion of the incident light beam is reflected and a second portion of the incident light beam is diffracted upon being transmitted through the diffraction grating; receiving interference patterns produced from the first portion of he incident light beam reflected from the diffraction grating interfering with the second portion of the incident light beam reflected from the target surface; measuring the intensity of the interference patterns to determine the distance to determine the distance between a reference point and the surface; varying the position of the object relative to the diffraction grating; and processing the measured distances to profile the surface of the object. Systems are also provided.

System and method for surface profiling a target object

The present invention relates to microinterferometers. An embodiment of a microinterferometer for accurately measuring the distance to an object surface includes a substrate and a tunable, phase-sensitive, reflective diffraction grating formed atop said substrate. The diffraction grating is configured to reflect a first portion of an incident light and transmit a second portion of the incident light, such that the second portion of the incident light is diffracted. The diffraction grating is further configured to be controllably adjusted. The microinterferometer also includes a photo-detector for receiving interference patterns produced from the first portion of the incident light reflected from the diffraction grating and the second portion of the incident light reflected from the object surface. The microinterferometer also includes a controller coupled to the photo-detector and the diffraction grating for adjusting the diffraction grating, such that the interference patterns are altered. Systems and methods are also disclosed.

Microinterferometer for measuring distance with improved sensitivity

Several embodiments of a microinterferometer are disclosed. A first embodiment of a microinterferometer for measuring the absolute distance to an object surface includes a substrate. The microinterferometer also includes a phase-sensitive, reflective diffraction grating formed on the substrate. The diffraction grating is configured to reflect a first portion of an incident light and transmit a second portion of the incident light, such that the second portion of the incident light is diffracted. The microinterferometer further includes a lens formed on the substrate for focusing the second portion of the incident light to a predetermined local distance, and a photo-detector for receiving interference patterns produced from the first portion of the incident light reflected from the diffraction grating and the second portion of the incident light reflected from the object surface.

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Decatur, GA, United States of America

Hosein Ali Razavi