Carl-zeiss-stiftung

Horst Kunzmann

Karl Schepperle

Gerhard Trieb

Peter Vogt

Franz Waldele

The four components of the deviations of a rotary table from an ideal axis of rotation can be obtained by a single measuring method wherein a test body (4) having a plurality of well-defined measurement points is placed on the rotary table (1) and the positions of said measuring points are then determined by means of a coordinate-measuring instrument (3), for each of various angular positions of the rotary table, there being thus a set of ascertained measurement-point coordinates for each of the angular positions of the rotary table. From the sets of measurement-point coordinates, the travel deviations f.sub.a, f.sub.r and f.sub.t of the axis of rotation, and the angle-position deviation p.sub.w are then determined by calculation.

Method of measuring rotary-table deviations

The invention contemplates a multi-coordinate measuring machine with interferometric detection of the path of displacement in each of the measurement axes.

Multi-coordinate measuring machine

The invention contemplates a beam splitter which consists of a phase grating (5) which transmits at zero order the greatest part of the radiation of a two-mode laser (1) and which diffracts a relatively small part of the radiation, symmetrically at 1 order and -1 order, respectively. The intensity of components of the radiation polarized perpendicular to each other and associated with the two modes is measured by detectors (11, 12) in front of which polarization sheets (9, 10) are arranged as analyzers, and outputs of the detectors are used to regulate the center frequency of the laser tube (1).

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Braunschweig, Germany

Horst Kunzmann