Siemens Aktiengesellschaft

Horst Kiemle

Hartwig E Ruell

Eckhard Storck

Hans Eschler

Dietlind Pekau

Gerd Goldmann

Peter Graf

By Irmela Bismarck, Heir

Ulrich V Hundelshausen, Deceased

Manfred Lang

By Burkhard Hundelshausen, Heir

A process of recording information which is in the form of electrical signals by pulse amplitude modulating an object wave and directing it with a reference wave onto a moving light-sensitive storage medium to record hybrid holograms thereon characterized in that the object beam is split into a plurality of parallel object beams each of which is individually and separately pulse modulated with a separate signal to be recorded, focusing the parallel modulated beams into an astigmatic object wave and focusing the reference wave into an astigmatic reference wave, with each wave having a focal line extending parallel to the direction of feed being coplanar and each wave having a focal line which is extending perpendicular to the direction of feed being mirror symmetrical to the storage medium. Preferably, the rate of advance or feed of the storage medium is controlled so that the individual holograms are overlapping.

Process for holographic recording of data in the form of electrical

A device for testing masks, such as used in producing semiconductor components characterized by a source projecting a beam of coherent light at the mask, a multiple optic means which is either a lens raster or an objective lens arranged with a multiple hologram disposed in the path of the beam of light for converting the beam into a plurality of individual beams and focusing each of the individual beams on discrete points on the mask and a detector for detecting any light passed by the mask. Preferably, the device includes means for pivoting the beam from the source about one or two axes lying in a plane of the multiple optic means so that all of the individual beams are moved to scan in at least one direction.

Device for testing masks for semiconductor components

A holographic storage device which is capable of enabling both recording of information to be stored and retrieving information characterized by a portion of a beam of coherent light being directed onto a subhologram of an illumination hologram to create an illuminating beam which is projected on a modulator matrix which creates an object wave that is projected onto the storage medium during a recording operation. The device further includes a detector matrix utilized during the retrieval operation and both the detector matrix and the modulator matrix are separated from the storage medium by transparent bodies having an index of refraction greater than 1. In one embodiment, at least two of the transparent bodies include light splitting or distribution surfaces which split off a portion of the beam passing therethrough, the illumination hologram is preferably a surface relief reflection hologram and a retrodirective mirror is utilized to direct the beam passing through the first beam splitter to a second beam splitter to be projected onto the storage medium. In a second embodiment, the coherent beam of light is projected through a transparent body, the storage medium and received by a retrodirective mirror which directs it on the illumination hologram. In this embodiment, the illumination hologram can be in the same plane as the storage medium and the modulator matrix is a reflective matrix to reflect the modulated object beam back onto the storage medium. In a similar arrangement of the embodiment, the modulator matrix is a transparent matrix and an additional transparent body is arranged on the opposite side thereof with the illumination hologram disposed on opposite surfaces.

Holographic storage device

A holographic storage device which is capable of enabling both recording of information to be stored and retrieving information characterized by a portion of a beam of coherent light being directed onto a sub-hologram of an illumination hologram to create an illuminating beam which is projected on a modulator matrix which creates an object wave that is projected onto the storage medium during a recording operation. The device further includes a detector matrix utilized during the retrieval operation and both the detector matrix and the modulator matrix are separated from the storage medium by transparent bodies having an index of refraction greater than 1. In one embodiment, at least two of the transparent bodies include light splitting or distribution surfaces which split off a portion of the beam passing therethrough, the illumination hologram is preferably a surface relief reflection hologram and a retrodirective mirror is utilized to direct the beam passing through the first beam splitter to a second beam splitter to be projected onto the storage medium. In a second embodiment, the coherent beam of light is projected through a transparent body, the storage medium and received by a retrodirective mirror which directs it on the illumination hologram. In this embodiment, the illumination hologram can be in the same plane as the storage medium and the modulator matrix is a reflective matrix to reflect the modulated object beam back onto the storage medium. In a similar arrangement of the embodiment, the modulator matrix is a transparent matrix and an additional transparent body is arranged on the opposite side thereof with the illumination hologram disposed on opposite surfaces.

Apparatus and method for holographic storage of data utilizing a light source and a number of light deflectors such that a single beam can be used to read data from a number of different holograms simultaneously.

Apparatus and method for holographic storage of data

A device for electro-optically, computer-controlled drawing of a plurality of mask patterns in a layer of light sensitive material disposed on a plane of a mask carrier characterized by a source of coherent light, a modulator for modulating the coherent light, a light detector for imposing a row-by-row scanning motion on the beam of light, an objective device for projecting the beam onto a layer of the light sensitive material, optical lenses arranged between the light deflector and the objective device for imaging the output plane of the light deflector onto a plane of the objective which includes an objective lens arrangement for focusing the beam and a multiplier hologram for splitting up the focused beam emerging from the objective lens arrangement into a plurality of identical sub-beams directed in different directions so that the plurality of spaced identical mask patterns are simultaneously formed in a light sensitive layer. Preferably, the device includes an immersion means such as a glass body which is disposed between the objective device and the plane of the mask carrier.

Growing community of inventors

Neuried, Germany

Horst Kiemle