Samsung Electronics Co., Ltd.

Hoon Jeong

Sung-eui Kim

Jae-Hyun Kim

Ji-Young Kim

Seung-Jun Lee

Ki-Whan Song

Dong-Won Lee

Kyung-Eun Kim

Jong-Bom Seo

Young-Seung Cho

Jun-soo Lee

Chan-Won Kim

Ji-Hye Hwang

Jung-Gu Han

Byung-Gook Park

Dae-Ik Kim

Sung-Hwan Kim

Yong-Chul Oh

Hyoung-sub Kim

Yong-lack Choi

Ho-Ju Song

Jong-Duk Lee

Sung-In Hong

A semiconductor device includes a substrate including an active region, a plurality of conductive line structures separate from the substrate, a plurality of contact plugs between the plurality of conductive line structures, a plurality of landing pads connected to a corresponding contact plug of the plurality of contact plugs, a landing pad insulation pattern between the plurality of landing pads, and a first insulation spacer between the landing pad insulation pattern and first conductive line structures from among the plurality of conductive line structures.

Semiconductor device including landing pad for connecting substrate and capacitor

Semiconductor devices are provided. A semiconductor device includes a bit line structure and a contact plug. The contact plug is adjacent a sidewall of the bit line structure and is on a sloped surface of the bit line structure. Moreover, in some embodiments, a level of the sloped surface of the bit line structure becomes lower as the sloped surface approaches the sidewall of the bit line structure.

Semiconductor devices including a bit line structure and a contact plug

A semiconductor device includes a first capacitor structure, a second capacitor structure, and an insulation pattern. The first capacitor structure includes a first lower electrode, a first dielectric layer and a first upper electrode sequentially stacked on a substrate. The second capacitor structure includes a second lower electrode, a second dielectric layer and a second upper electrode sequentially stacked on the substrate, and is adjacent to the first capacitor structure. The insulation pattern partially fills a space between the first and second capacitor structures, and an air gap is formed between the first and second capacitor structures on the insulation pattern.

Semiconductor devices including capacitors and methods of manufacturing the same

Semiconductor devices including capacitors

A memory device includes an insulation layer, an active pattern, a gate insulation layer and a gate electrode. The insulation layer is formed on a substrate. The active pattern is formed on the insulation layer, and includes two protrusions and a recess between the protrusions. The active pattern includes a first impurity region and a second impurity region at upper portions of the protrusions distal from the substrate, respectively, and a base region at the other portions serving as a floating body for storing data. The gate insulation layer is formed on a surface of the active pattern. The gate electrode is formed on the gate insulation layer, and surrounds a lower portion of the active pattern and partially fills the recess.

Bipolar transistor for a memory array

A method of fabricating a semiconductor device includes forming a well impurity region, a lower impurity region and an upper impurity region in a semiconductor substrate. The lower impurity region has a different conductivity type than a conductivity type of the well impurity region, the upper impurity region has a different conductivity type than the conductivity type of the lower impurity region, and the upper impurity region has a same conductivity type as the conductivity type of the well impurity region and has a higher impurity concentration than an impurity concentration of the well impurity region. The semiconductor substrate is etched to form lower semiconductor patterns, upper semiconductor patterns upwardly projecting from predetermined regions of the lower semiconductor patterns. An isolation layer filling the first and second spaces between the lower semiconductor patterns and between the upper semiconductor patterns, respectively is formed.

Method of fabricating semiconductor device and electronic system

Provided are a capacitorless DRAM (dynamic random access memory) and a fabrication method thereof. In a capacitorless DRAM, a pair of cylindrical auxiliary gates is formed within a bulk substrate. Thus, a volume of a channel body formed at a region where the cylindrical auxiliary gates contact with each other can be increased, while an area of a junction region where the channel body contact source and drain regions can be reduced. As a result, capacitance of the channel body can be increased, and a generation of leakage current through the second junction region can be reduced. The application of a back bias to the cylindrical auxiliary gates can improve a charge storage capability of the channel body.

Capacitorless DRAM with cylindrical auxiliary gate and fabrication method thereof

A dynamic random access memory (DRAM) device has dual-gate vertical channel transistors. The device is comprised of pillar-shaped active patterns including source regions contacting with a semiconductor substrate, drain regions formed over the drain regions, and channel regions formed between the source and drain regions. The active patterns are disposed in a cell array field. On the active patterns, bit lines are arranged to connect the drain regions along a direction. Between the active patterns, word lines are arranged intersecting the bit lines. Gat insulation films are interposed between the word lines and active patterns.

Dual-gate dynamic random access memory device having vertical channel transistors and method of fabricating the same

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Hwaseong-si, South Korea

Hoon Jeong