California Institute of Technology

Yale University

University of California

Hongxing Tang

Michael Roukes

Mo Li

Wonhee Lee

Wolfram Pernice

Chung-Wah Fon

Blake Waters Axelrod

John Liang Tan

Chi Xiong

Jan Schroers

Golden Kumar

Jessica L Arlett

David D Awschalom

Benjamin Gudlewski

Roland K Kawakami

Xianwen Liu

Joshua Surya

Carsten Schuck

Richard Renaud

James Maloney

The present invention provides octave-spanning optical frequency combs. The octave-spanning optical frequency combs employ microresonators having improved stability using a smaller form factor. In some embodiments, the octave-spanning optical frequency combs are fabricated using aluminum nitride (AlN). AlN is a more robust Kerr material for generating octave-spanning soliton comb (e.g., 1.5 octaves or more).

Octave-spanning soliton comb

The present invention provides a device and system for high-efficiency and low-noise detection of single photons within the visible and infrared spectrum. In certain embodiments, the device of the invention can be integrated within photonic circuits to provide on-chip photon detection. The device comprises a traveling wave design comprising a waveguide layer and a superconducting nanowire atop of the waveguide.

Superconducting single photon detector

Devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters.

Nanomechanical photonic devices

A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Polymer NEMs for cell physiology and microfabricated cell positioning system for micro-biocalorimeter

An embodiment of the invention provides a neural probe containing a plurality of nanoscale recording electrodes. The recording electrodes have a width of 1 micron or less and a distance between adjacent recording electrodes is 10 microns or less. Another embodiment of the invention provides a neural probe comprising a plurality of microfabricated recording electrodes located on a polymer base material, such as a flexible polymer cantilever.

Microfabricated neural probes and methods of making same

The present invention relates to materials, methods and apparatuses for performing imprint lithography using amorphous metallic materials. The amorphous metallic materials can be employed as imprint media and thermoplastic forming processes are applied during the pattern transfer procedure to produce micron scale and nanoscale patterns in the amorphous metallic layer. The pattern transfer is in the form of direct mask embossing or through a serial nano-indentation process. A rewriting process is also disclosed, which involves an erasing mechanism that is accomplished by means of a second thermoplastic forming process. The amorphous metallic materials may also be used directly as an embossing mold in imprint lithography to allow high volume imprint nano-manufacturing. This invention also comprises of a method of smoothening surfaces under the action of the surface tension alone.

Method for imprinting and erasing amorphous metal alloys

The present invention relates to devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters. The waveguide can also comprise a gap such that two cantilever bridges are formed.

Polymer NEMS for cell physiology and microfabricated cell positioning system for micro-biocalorimeter

A biosensor is comprised of a free and a biofunctionalized recognition self-sensing nanocantilever, a dock adjacent to the ends of the nanocantilevers, and a gap between the nanocantilevers and dock. The self-sensing cantilevers each include a semiconductor piezoresistor defined in a pair of legs about which the cantilevers flex. A bias power or current is applied to the piezoresistor. The sensitivity of the cantilevers is optimized for a given ambient temperature and geometry of the cantilevers and dock by minimizing the force spectral density, S, of the cantilevers to determine the optimum bias power, P. A sub-aN/&#x221a;Hz force sensitivity is obtained by scaling down the dimensions of the cantilevers and supplying an optimum bias power as a function of temperature and geometry.

Biological detection based on differentially coupled nanomechanical systems using self-sensing cantilevers with attonewton force resolution

Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.

Microscale calorimeter

Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.

Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes

A highly sensitive and ultra-high density array of electromechanical nanowires is fabricated. Nanowires are extremely sensitive to the strain induced by the attachment of biological and chemical species. Real-time detection is realized through piezoresistive transduction from the specially designed materials that form the nanowires. These specially designed materials include doped silicon or germanium, doped III-V semiconductors such as GaAs, GaN and InAs systems, and ultra-thin metal films.

Strain sensors based on nanowire piezoresistor wires and arrays

Ferromagnetic semiconductor-based sensor devices, including sensors for detecting pressure changes and sensors for detecting magnetic fields, such as switching events in a magnetic recording medium. The pressure sensors of the present invention detect pressure changes using magnetoresistive measurement techniques, and in particular GPHE techniques. Magnetic field detection sensors such as magnetic switching detection sensors include ferromagnetic semiconductor-based materials that provide enhanced sensitivity relative to known materials and techniques. Such magnetic switching detection sensors according to the present invention are particularly useful as a read head sensor for HDD and other magnetic storage technologies.

Sensors based on giant planar hall effect in dilute magnetic semiconductors

An on-chip coil is provided in a micromachined device for magnetic actuation of a nanoelectromechanical microcantilever. The novel geometry involves a three dimensional solenoid or planar coil carrying high current that generates a large enough magnetic field in its close proximity to a permalloy thin film patch or columnar magnet disposed on the distal end of the piezoresistive microcantilever to effectively interacts with the magnetic thin film deposited on the microcantilever. The device comprises an effective actuators which can be integrated with biofunctionalized cantilever arrays in hybrid semiconductor-microfluidics devices for the analysis and detection of biological analytes.

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Pasadena, CA, United States of America

Hongxing Tang