Western Digital (fremont), Inc.

Hongmei Han

Jinqiu Zhang

Feng Q Liu

Xiaotian Zhou

Ming Sun

Ming Jiang

Ying Hong

Hai Sun

Guanghong Luo

Hongping Yuan

Lingyun Miao

Xiaoyu Yang

Zeyu Ma

A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer that includes a first sublayer in a side shield region and a second sublayer outside of the side shield region is provided. A trench is formed in the intermediate layer using multiple etches. A first etch removes part of the second sublayer, providing a first portion of the trench having a first sidewall angle. A second etch removes part of the first sublayer, providing a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. A main pole is provided in the trench and has a plurality of sidewalls. The sidewalls have the second sidewall angle in the second portion of the trench and at least one main pole sidewall angle corresponding to the first sidewall angle in the first portion of the trench.

Method for fabricating a magnetic writer using multiple etches of damascene materials

A method and system provide a magnetic transducer having an air-bearing surface (ABS) location. The method includes forming a trench in the intermediate layer using a plurality of etches. A first etch substantially provides a first portion of the trench having a first sidewall angle. The second etch substantially provides a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. The second portion of the trench includes the ABS location. The method also includes providing a main pole in the trench. The main pole has a plurality of sidewalls. The sidewalls having the first sidewall angle in the first portion of the trench and the second sidewall angle in the second portion of the trench.

Method for fabricating a magnetic writer using multiple etches

A process for manufacturing a writer main pole for a perpendicular magnetic recording system is provided. The writer pole may have a constant sidewall angle from the ABS to yoke and may be formed out of an insulating material and a magnetic material. The sidewall angle of the yoke region may be adjusted during manufacture. The ABS region may correspond to the magnetic material and the yoke region may correspond to the insulating material. The insulating material may comprise Alumina. The magnetic material may comprise a NiFe alloy.

Process for making PMR writer with constant side wall angle

A method for fabricating a magnetic transducer having an air-bearing surface (ABS). An underlayer having a first and second regions and a bevel connecting these regions is provided. The first region is thicker and closer to the ABS than the second region. An intermediate layer conformal with the underlayer is provided. A hard mask layer having a top surface perpendicular to the ABS is formed on the intermediate layer. Part of the hard mask and intermediate layers are removed to provide a trench. The trench has a bottom surface and sidewalls having a first angle between the bottom surface and the intermediate layer and a second angle corresponding to the hard mask layer. A pole is provided in the trench. The pole has a pole tip, a yoke distal, and a bottom bevel. At least the yoke includes sidewalls having sidewall angles corresponding to the first and second angles.

Method and system for providing a magnetic recording pole having a dual sidewall angle

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Fremont, CA, United States of America

Hongmei Han