Asm Technology Singapore Pte Ltd

HongLiang Lu

Sathish Kumar Balakrishnan

Kumaresh Govindan Radhakrishnan

Lian Hok Tan

Wen Ge Tu

A transfer device for holding an object comprises: i) a housing; ii) at least one inlet conduit having an inlet for gas; iii) a plurality of sets of outlet conduits, each set of outlet conduits being in fluid communication with the at least one inlet conduit and having a plurality of outlets for directing the gas out of the outlet conduits. The respective outlets of the sets of outlet conduits are arranged in a direction along the housing surface and away from a center region relative to the respective sets of outlet conduits, so that a laminar gas flow that flows along the housing surface generates a pressure differential which creates a force towards the center region to hold the object against the housing surface.

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Singapore, Singapore

HongLiang Lu