Mks Instruments, Inc.

Energetiq Technology, Inc.

Block Engineering, LLC

Hongke Ye

Donald K Smith

Junhua Ding

Matthew Mark Besen

Petros Amestis Kotidis

Gordon Hill

Robert M Carangelo

Erik R Deutsch

Huiling Zhu

Jeffrey S Socha

Ron Collins

Peter Zemek

Andrew Wright

Alexander Mazurenko

Anish K Goyal

Daniil Stolyarov

Vidi Saptari

A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.

Method and apparatus for pulse gas delivery with concentration measurement

Presented herein are systems and methods for quantifying trace and/or ultra-trace levels of a species&#x2014;for example, HS or HO&#x2014;in a natural gas line. The systems and methods employ a tunable laser, such as a tunable diode laser, vertical-cavity surface-emitting laser (VCSEL), external cavity diode laser or a vertical external-cavity surface-emitting laser (VECSEL) or a tunable quantum cascade laser (QCL). The laser produces an output beam over a set of one or more relatively narrow, high resolution wavelength bands at a scan rate from about 0.1 Hz to about 1000 Hz. A natural gas sample comprising a trace level of a species of interest passes through a flow cell into which the output beam from the laser is guided. An optical detector receives light from the flow cell, producing a signal indicative of the absorption attenuation from which the concentration of the trace species is determined.

Gas measurement system

A system and method are disclosed for gas sensing over a wide tunable wavelength range provided by one or more quantum cascade lasers. A laser beam is generated within the wide tunable wavelength range, which is given by the sum of the wavelength ranges from the individual lasers. Gas sensing or detection is achieved by obtaining an infrared absorption spectrum for a sample contained in one or more cells having different path lengths for the laser beam.

Quantum cascade laser (QCL) based gas sensing system and method

An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

Laser-driven light source

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Chelmsford, MA, United States of America

Hongke Ye