Electro Scientific Industries, Inc.

Honghua Hu

Jan Kleinert

Kurt M Eaton

Daragh Finn

Zhibin Lin

Guangyu Li

Brandon Bilyeu

Chuan Yang

Joel Schrauben

Yuan Liu

Jim Brookhyser

Ruolin Chen

Geoffrey Lott

Disclosed is a method and an apparatus to process a workpiece including producing a first beam of laser energy characterized by a first spatial intensity distribution. A first workpiece is processed using the first beam of laser energy to form a plurality of features at a first distance between the scan lens and the first workpiece and forming a second features at a second distance. The method includes determining which of the plurality of features has a shape that most closely resembles the shape of the first spatial intensity distribution and setting a process distance as the distance that produced that feature. Using this process distance, a surface of a second workpiece is processed using second beam of laser energy with a second spatial intensity distribution.

Location of image plane in a laser processing system

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Portland, OR, United States of America

Honghua Hu