Huazhong University of Science and Technology

Hong Yang

Hua Zhang

Hong Ma

A method for parameter extraction of a sensitive probe and degree-of-freedom coupling calculation of a capacitive displacement sensor is provided. Through applying multiple groups of charge excitations to the mechanically sensitive probe with a multi-conductor structure, the electrostatic field distribution inside the sensitive probe under each group of excitation charges is obtained by numerical calculation to compute the electrostatic field energy, thereby finally extracting the complete distributed capacitance matrix of the sensitive probe. For the couplings among the multi-degree-of-freedom displacements caused by the sensitive probe, through establishing an indefinite admittance matrix of the sensitive probe and connecting the subsequent multi-channel sensing circuits, a complete equivalent circuit model for multi-degree-of-freedom coupling analysis is obtained to quantitatively calculated the degree-of-freedom coupling caused by displacement of the test mass.

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Hubei, China

Hong Yang