Samsung Electronics Co., Ltd.

Hong Seok Kim

Jong Jin Park

Dong Woo Kang

Young Kwan Kim

Byoung Soo Ko

Kang Rib Kim

A compressor includes a motor which includes a stator assembly configured to include a stator in which a hollow is formed, a plurality of coils formed by a winding wound on the stator, and an insulator for insulating the stator from the coils, and a rotor inserted into the hollow, configured to rotate about a rotation axis. The rotor includes a plurality of poles, and a curvature radius of an outer circumference of a center part of the poles is different from a curvature radius of an outer circumference of an edge part of the poles. A method for fabricating a motor includes coupling a stator hook formed in a busbar assembly having a plurality of busbars to a hook engaging part formed in the stator assembly having the plurality of coils, and fusing a winding onto a folded plate connected to the plurality of busbars.

Compressor, motor included therein, and method for manufacturing the motor

The invention relates to an alignment measuring method of a photolithography process by which a misalignment degree for each shot region of a wafer is indexed to improve the accuracy of determining the possibility of overlay defects. The method includes: measuring the overlay state of each pattern image transcribed to every shot region of a wafer; counting the number of shot regions judged as overlay defects with the misalignment amount of each measured shot region; calculating in percentage the number of shot regions judged as overlay defects against the number of total shot regions of the wafer; and comparing the calculated percentage value with a preset value to determine the possibility of rework. Accordingly, it is possible to estimate the misalignment amount of the unmeasured shot regions with that of the sampled and measured shot regions, determine the possibility of overlay defects of each shot region and determine quickly and conveniently the need to rework, thereby shortening the time of manufacturing semiconductor devices, improving reliability of judgment on rework due to exclusion of a worker's personal judgment and making progress in cost effectiveness of rework and manufactured yield.

Growing community of inventors

Yongin-si, South Korea

Hong Seok Kim