Panasonic Technologies, Inc.

Hong Li

Stephen D Senturia

David Volfson

A method for polishing a substrate having at least one micro-sized structure. The method includes identifying a first region of the substrate on which a micro-sized structure is to be located. The first region is the region in which polishing is desired. A second region of the substrate, in which polishing is not desired, is also identified. An adhesion promoter is optionally applied to the substrate. The second region of the substrate is coated with a selected coating material that does not degrade substantially when exposed to a selected electrolyte. Material is removed from the first region, exposing a micro-sized structure. The coating material may be removed by the same machining process that forms the micro-sized structure. The substrate is submerged in the selected electrolyte so that the first region is exposed to the electrolyte. The first region of the substrate is electropolished. The coating is then optionally removed.

Method for polishing micro-sized structures

A method of manufacturing a multiple microelectrode assembly is disclosed. Micromachining technology (such as micro-electrical-discharge machining technology, laser-beam micromachining, electron-beam micromachining) is used to manufacture an electrode/base assembly. The electrode/base assembly is placed within a container; a liquid material is placed into the container; the liquid material surrounds the electrodes of the electrode/base assembly and is allowed to solidify; and the solidified liquid material in combination with the electrode/base assembly is separated from the container. The bottom (or base) portion of the electrode/base assembly is then removed. The electrodes of the electrode/base assembly comprise a plurality of rod-like members of very small (on the order of 1 micron) metallic members of preselected dimension, shape and spacing, by which they are adapted in combination with the surrounding insulating material as a multiple microelectrode assembly.

Method of manufacturing a multiple microelectrode assembly

A method of manufacturing a precision micro-filter and a micro-filter manufactured thereby is disclosed. A micro-mold is manufactured using micro-machining technology (such as micro-electrical-discharge machining technology, laser-beam micro-machining, electron beam micro-machining) to make a filter mold with a plurality of rod-like protrusions, of the shape, dimensions, and spacing required for the pores of a finished micro-filter. A molding material is placed into the micro-mold, the molding composition is allowed to solidify to form a micro-filter, the passageways of which conform precisely to the rod-like protrusions of the mold. This micro-filter is then separated from the micro-mold.

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Cambridge, MA, United States of America

Hong Li