New Power Plasma Co., Ltd.

Sungkyunkwan University

Hong Kweon Moon

Byoung Kuk Lee

Won Yong Sung

Chang Seob Lim

Geun Wan Koo

Keun Wan Koo

Provided is a resonant network for plasma power supply, which is connected between a power supply unit and an output unit. The resonant network includes a resonant inductor connected in series with the power supply unit, a resonant capacitor connected in parallel with the output unit and connected in series with the resonant inductor, and a passive element connected in series with the output unit and the resonant inductor and connected in parallel with the resonant capacitor.

Resonant network for plasma power supply and power supply device for plasma generator

A power supply apparatus able to control an output current for maintaining plasma in a plasma generator includes: a switching power supply including a rectifier, an inverter, and a phase shifter; a plasma source connected to the switching power supply and generating the plasma in the plasma generator; a resonance network connected between the switching power supply and the plasma source and including a resonance inductor connected to a primary winding in series and a resonance capacitor connected to the plasma source in parallel and connected to the resonance inductor in series; and a control unit controlling the switching power supply in order to phase-shift a voltage and a current provided to the resonance network.

Power supply apparatus able to control output current and power supply method using the same

Growing community of inventors

Gyeonggi-do, South Korea

Hong Kweon Moon