Hynix Semiconductor Inc.

Hong-Gu Lee

Chang-Youn Hwang

Ik-Soo Choi

A method for fabricating a semiconductor device includes forming a first insulating layer over a substrate where a landing contact plug is formed, forming an etch barrier pattern having a line type open region over the first insulating layer, forming a second insulating layer for planarization over the etch barrier pattern, forming a contact mask having a hole type open region over the second insulating layer, performing a self-aligned contact etching process using the etch barrier pattern to etch the second insulating layer disposed under the hole type open region and the first insulating layer disposed under the line type open region to form a contact hole a bottom of which is opened above the landing contact plug, forming a storage node contact plug in the contact hole, and forming a storage node over the storage node contact plug.

Method for fabricating semiconductor device

A method for forming a landing contact plug in a semiconductor device is provided. The method includes the steps of: forming a plurality of gate structures on a substrate, each gate structure including a gate hard mask; forming an inter-layer insulation layer over the gate structures; planarizing the inter-layer insulation layer until the gate hard mask is exposed; forming an etch barrier layer on the inter-layer insulation layer; etching a predetermined portion of the inter-layer insulation layer by using the etch barrier layer as an etch barrier to form a plurality of contact holes; forming a conductive layer until the conductive layer fills the contact holes; removing surface roughness created during the formation of the conductive layer by a first etch-back process; and planarizing the conductive layer by a second etch-back process until the gate hard mask is exposed.

Growing community of inventors

Kyoungki-do, South Korea

Hong-Gu Lee